MATERIAL
SAFETY DATA
Arch Chemicals, Inc.
FOR ANY EMERGENCY, CALL 24HOURS/ 7 DAYS: 1-800-654-6911
FOR ALL TRANSPORTATION ACCIDENTS, CALL CHEMTREC(R): 1-800-424-9300
FOR ALL MSDS QUESTIONS & REQUESTS, CALL: 1-800-511-MSDS
PRODUCT NAME: SC 270 NEGATIVE RESIST
I. PRODUCT AND COMPANY IDENTIFICATION
REVISION DATE: 12-13-2000
SUPERCEDES: 12-15-1999
MSDS NO: 00553-0073 - 800096
SYNONYMS: None
CHEMICAL FAMILY: Organic mixture
DESCRIPTION / USE: Negative photoresist
FORMULA: Not applicable/Mixture
Arch Chemicals, Inc. 501 Merritt 7 PO Box 5204 Norwalk, CT 06856-5204
MATERIAL SAFETY DATAII. COMPOSITION/INFORMATION ON
INGREDIENTS
CAS or CHEMICAL NAME CAS # % Range
Benzene, dimethyl- 1330-20-7 55 - 75
Cyclized polyisoprene 68441-13-4 9 - 29
Benzene, ethyl- 100-41-4 12 - 18
2,6-Bis(4-azidobenzylidene)-4-methylcyclohexanone 5284-79-7 0.1 - 0.6
Phenol, 2,6-bis(1,1-dimethylethyl)-4-methyl- 128-37-0 0.01 - 0.1
III. HAZARDS IDENTIFICATION
OSHA Hazard Classification: flammable, eye irritant, skin irritant, respiratory irritant, central nervous
system depressant, liver toxin, blood toxin, kidney toxin, lung toxin
Routes of Entry: Inhalation, skin, eyes, ingestion
Chemical Interactions: No known interactions
Medical Conditions Aggravated: Skin diseases, Respiratory diseases including asthma and bronchitis, Pre-
existing liver diseases, Pre-existing kidney disease, cardiovascular disease
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Human Threshold Response Data
Odor Threshold:
Xylene 20.0 ppm
Irritation Threshold:
Xylene 100.0 - 200.0 ppm
Hazardous Materials Identification System/National Fire Protection Association Classifications
Hazard Ratings: Health Flammability Reactivity
HMIS 2* 3 0
NFPA Not established
Immediate (Acute) Health Effects
Inhalation Toxicity: Not expected to cause significant toxicity unless there is prolonged exposure to
high concentrations. Inhalation of high concentrations may result in central nervous
system (CNS) effects such as dizziness, weakness, fatigue, nausea, headache, and
lack of coordination.
Inhalation of high concentrations may cause cardiac sensitization leading to risk of
arrhythmia (irregular heartbeat).
Inhalation Irritation: High concentrations are moderately irritating to the eyes, nose, throat, and lungs.
Skin Contact: Skin contact may cause moderate irritation consisting of transient redness and
swelling. This irritant effect would not be expected to result in permanent damage.
Skin Absorption: No significant adverse effects to health would be expected to occur from dermal
contact.
Eye Contact Contact may cause moderate irritation consisting of transient redness, swelling, and
mucous membrane discharge to the conjunctiva. No corneal involvement or visual
impairment is expected.
Ingestion Irritation: Ingestion may cause irritation of the gastrointestinal tract and gastrointestinal
discomfort with any or all of the following symptoms: nausea, vomiting, lethargy
or diarrhea.
Ingestion Toxicity: Slightly toxic if swallowed.
AcuteTarget Organ Toxicity: Central nervous system, Heart, Eyes, Skin, Respiratory Tract, Mucous
membranes
Prolonged (Chronic) Health Effects
Carcinogenicity: The International Agency for Research on Cancer (IARC) has
classified this product or a component of this product as a Group
3 substance, Unclassifiable as to Its Carcinogenicity to Humans.
Reproductive and Developmental Toxicity: No reproductive or developmental risk to humans is expected
from exposure to this product.
Inhalation: Prolonged or repeated exposure may cause kidney, liver and blood damage.
Skin Contact: Dermal contact may cause defatting of skin and/or dermatitis.
Skin There are no known or reported effects from chronic exposure except for effects (if any)
Absorption: similar to those experienced from acute exposure.
Ingestion: There are no known or reported effects from chronic ingestion except for effects similar to
those experienced from single exposure.
Chronic Target Organ Toxicity: Liver, Blood, Skin, Kidneys
Supplemental Health Hazard Information: No additional health information available.
IV. FIRST AID
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Inhalation: IF INHALED: Remove individual to fresh air. Seek medical attention if breathing becomes
difficult.
Skin Contact: IF ON SKIN: Immediately flush skin with plenty of water for 15 minutes. If clothing
comes in contact with the product, the clothing should be removed immediately and
laundered before re-use. Call a physician.
Eyes: IF IN EYES: Immediately flush eyes with plenty of water for at least 15 minutes while
holding eyelids apart. Call a physician immediately.
Ingestion: IF SWALLOWED: Call a physician immediately. DO NOT induce vomiting unless
directed to do so by a physician. Never give anything by mouth to an unconscious person.
V. FIRE FIGHTING MEASURES
Flammability Summary (OSHA): Flammable.
Flammable Properties
Flash Point: 27 Deg. C. (Test Method: Cleveland Closed Cup)/ 81 Deg. F. (Test Method:
Tag Closed Cup)
Autoignition Temperature: No data
Upper Flammable/Explosive Limit, % in air: 7%
Lower Flammable/Explosive Limit, % in air: 1%
Fire/Explosion Hazards: Vapors may be ignited by sparks, flames or other sources of ignition if
material is above the flash point giving rise to a flash fire. Vapors are
heavier than air and may travel to a source of ignition and flash back.
Vapors can travel to a source of ignition and flash back.
Extinguishing Media: Use alcohol resistant foam, carbon dioxide, dry chemical, or vaporizing
liquid extinguishing agents. Water spray or fog may also be effective for
extinguishing or to absorb heat and keep exposed material from being
damaged by fire.
Fire Fighting Instructions: Response to this material requires the use of a full encapsulated suit and
full-face (NIOSH approved) self-contained breathing apparatus (SCBA).
Use water to cool containers.
Hazardous Combustion Products: Oxides of nitrogen, carbon monoxide, carbon dioxide
VI. ACCIDENTAL RELEASE MEASURES
Personal Protection for Additional protective clothing must be worn to prevent personal contact with
Emergency Situations: this material. Those items include but are not limited to boots, impervious
gloves, hard hat, splash-proof goggles, impervious clothing, i.e., chemically
impermeable suit, self-contained breathing apparatus.
Spill Mitigation Procedures
Air Release: Hazardous concentrations in air may be found in local spill area and
immediately downwind. Vapors may be suppressed by the use of water fog.
Contain all liquid for treatment and/or disposal as a (potential) hazardous
waste.
Water Release: This material is lighter than water. This material is insoluble in water. Contain
all liquid for treatment and/or disposal as a (potential) hazardous waste. Notify
all downstream users of possible contamination. Divert water flow around spill
if possible and safe to do so.
Land Release: Create a dike or trench to contain materials. Absorb spill with inert material
(e.g., dry sand, clay, earth or commercial absorbent), then place in a chemical
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waste container. Decontaminate all clothing and the spill area using a detergent
and flush with large amounts of water. Contain all contaminated water for
disposal and/or treatment.
Additional Spill Information: Remove all sources of ignition. Stop source of spill as soon as possible and
notify appropriate personnel. Utilize emergency response personal protection
equipment prior to the start of any response. Evacuate all non-essential
personnel. Dispose of spill residues per guidelines under Section XIII, Disposal
Consideration.
VII. HANDLING AND STORAGE
Handling: Do not take internally. Avoid contact with skin, eyes and clothing.
Upon contact with skin or eyes, wash off with water. Avoid breathing
mist or vapor. Ground and bond containers when transferring material.
Storage: Store in a cool dry ventilated location, away from sources of ignition
or other incompatible conditions and chemicals. Keep container(s)
closed. Keep container closed when not in use.
Do not expose to direct light.
Outside or detached storage is preferred.
Inside storage should be in a standard flammable liquids storage room
or cabinet.
Shelf Life Limitations: See label or certificate of analysis for shelf life if applicable.
Incompatible Materials for Storage: Refer to Section X, "Incompatible Materials."
VIII. EXPOSURE CONTROLS / PERSONAL PROTECTION
Ventilation: Local exhaust ventilation or other engineering controls are normally required when
handling or using this product to keep exposure to airborne contaminants below the
TLV, PEL, or other recommended exposure limit and/or maintain operator comfort.
Use explosion-proof ventilation equipment when handling this product.
Protective Equipment for Routine Use of Product
Respiratory Protection: Wear a NIOSH approved respirator if levels above the exposure limits are possible.
Respirator Type(s): A NIOSH approved air purifying respirator with organic vapor cartridge. Air
purifying respirators should not be used in oxygen deficient or IDLH atmospheres
or if exposure concentrations exceed ten (10) times the published limit.
Skin: Wear impervious gloves to avoid skin contact. Follow good industrial hygiene
practices.
Eyes: Use chemical goggles.
Protective Clothing Type: Polyvinylalcohol - Do not use this material with water applications., VitonTM,
Polyethylene and ethylene vinyl alcohol copolymer such as 4H.
Exposure Limit Data
CHEMICAL NAME CAS # OSHA PEL / STEL ACGIH LIMITS ACGIH WEEL
Xylenes (o-, m-, p- isomers) 1330-20-7 100 ppm TWA; 435 mg/m3 150 ppm STEL Not Established
TWA 100 ppm TWA
Ethyl benzene 100-41-4 100 ppm TWA; 435 mg/m3 125 ppm STEL Not Established
TWA 100 ppm TWA
CHEMICAL NAME NIOSH Immediately Dangerous to Life or Health:
900 ppm IDLH
Xylenes (o-, m-, p- isomers)
800 ppm IDLH (10 percent lower explosive limit)
Ethyl benzene
IX. PHYSICAL DATA
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Physical State: clear Solution
Color: yellow
Odor aromatic
Molecular Weight: Not Applicable/Mixture
pH (@ 25 Deg. C) Not applicable
Octanol/Water Coeff: No data
Solubility in Water: nil
Bulk Density: 0.85 - 0.88 g/cc
Specific Gravity: 0.85 - 0.88
Vapor Density: 3.5 - 4.00 (air =1)
Vapor Pressure: (@ 20 Deg. C) 10 mmHg
Evaporation Rate: 0.75 (n-Butyl acetate = 1)
Volatiles, % by vol.: 70 - 85 %
Boiling Point: No data
Freezing Point: No data
X. STABILITY AND REACTIVITY
Stability and Reactivity Summary: Stable under normal conditions. Static discharge may cause ignition at
temperatures at or above the flash point.
Reactive Properties: Flammable, Not sensitive to mechanical shock., Product is sensitive to
electrical static discharge.
Hazardous Polymerization: Will not occur
Conditions to Avoid: High temperatures Temperatures above the flash point in combination
with sparks, open flames, or other sources of ignition.
Chemical Incompatibility: strong oxidizing agents
Hazardous Decomposition Products: oxides of nitrogen, carbon dioxide, carbon monoxide
Decomposition Temperature: No data
XI. TOXICOLOGICAL INFORMATION
Component Animal
Oral LD50 value:
Benzene, dimethyl- Oral LD50 Rat = 4.3 g/kg
Dermal LD50 value:
Benzene, dimethyl- Dermal LD50 Rabbit > 2 g/kg
Inhalation LC50 value:
Benzene, dimethyl- Inhalation LC50 (4h) Rat = 6700 ppm
Product Animal Toxicity
Oral LD50 value: Rat Believed to be 4 - 5 g/kg
Dermal LD50 value: Rabbit Believed to be > 2 g/kg
Skin Irritation: This material is expected to be moderately irritating.
Eye Irritation: This material is expected to be moderately irritating.
Reproductive and This material at concentrations above the occupational exposure limits has
Developmental Toxicity: caused developmental effects in animals. However, these effects were observed
only at those doses that resulted in maternal toxicity.
Component Data:
Benzene, dimethyl- This material at concentrations above the occupational exposure limits has
caused developmental effects in animals. However, these effects were observed
only at those doses that resulted in maternal toxicity. Industrial exposures kept at
or below occupational exposures standards should not pose a reproductive or
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developmental toxicity hazard.
Benzene, ethyl- This material at concentrations above the occupational exposure limits has
caused developmental effects in animals. However, these effects were observed
only at those doses that resulted in maternal toxicity.
Mutagenicity: Not known or reported to be mutagenic.
Component Data:
Benzene, dimethyl- This chemical has been shown to be non-mutagenic based on a battery of assays.
Benzene, ethyl- This material has been shown to be non-mutagenic in the majority of a battery of
assays. Not expected to be a mutagenic hazard.
Carcinogenicity: This chemical is not known or reported to be carcinogenic by any reference
source including IARC, OSHA, NTP, or EPA.
Component Data:
Benzene, dimethyl- The International Agency for Research on Cancer (IARC) has classified this
product or a component of this product as a Group 3 substance, Unclassifiable
as to Its Carcinogenicity to Humans.
XII. ECOLOGICAL INFORMATION
Ecological Toxicity Values:
Benzene, dimethyl- Fathead minnow, 96 hr. LC50: = 13.4 mg/l (flow-through).
Rainbow trout (Salmo gairdneri) 96 hr. LC50: = 13.5 - 17.3 mg/l (nominal).
Daphnia magna, 24 hr. LC50: = 150 mg/l (nominal, static).
Bluegill 96 hr. LC50: = 24.5 mg/l (measured, static).
Bluegill 96 hr. LC50: = 15.7 mg/l (measured, flow-through).
Benzene, ethyl- Daphnia magna, 48 hr. LC50: = 75 mg/l (nominal, static).
Fathead minnow, 96 hr. LC50: = 9.1 - 12.1 mg/l (measured, flow-through).
XIII. DISPOSAL CONSIDERATIONS
CARE MUST BE TAKEN TO PREVENT ENVIRONMENTAL CONTAMINATION FROM THE USE OF THIS
MATERIAL. THE USER OF THIS MATERIAL HAS THE RESPONSIBILITY TO DISPOSE OF UNUSED
MATERIAL, RESIDUES AND CONTAINERS IN COMPLIANCE WITH ALL RELEVANT LOCAL, STATE AND
FEDERAL LAWS AND REGULATIONS REGARDING TREATMENT, STORAGE AND DISPOSAL FOR
HAZARDOUS AND NONHAZARDOUS WASTES.
Waste Disposal Summary: Spent or discarded material may be a hazardous waste.
Potential US EPA Waste Codes: D001
Disposal Methods: As a hazardous liquid waste, it must be disposed of in accordance with
local, state and federal regulations in a permitted hazardous waste
treatment, storage and disposal facility by incineration.
Components subject to land ban restrictions: Xylenes (o-, m-, p- isomers)
Ethyl benzene
XIV. TRANSPORTATION INFORMATION
THIS MATERIAL IS REGULATED AS A DOT HAZARDOUS MATERIAL.
DOT Description (49 CFR
Land (U.S. DOT): FLAMABLE LIQUID N.O.S., (XYLENE, ETHYL BENZENE) 3 UN1993 PGII
Air (IATA/ICAO): FLAMMABLE LIQUIDS, N.O.S., (CONTAINS XYLENE, ETHYL BENZENE), 3,
UN1993, PG III
Water (IMO): FLAMMABLE LIQUIDS, N.O.S., (CONTAINS XYLENE, ETHYL BENZENE), 3.3,
UN1993, PG III
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Flash Point: (C) 27
Hazard Label/Placard: (Primary) FLAMMABLE
Xylenes (isomers and mixture) final RQ = 100 pounds (45.4 kg); also listed as Xylene; also listed as
Xylene (mixed); also listed as Benzene, dimethyl-
Ethyl benzene final RQ = 1000 pounds (454 kg)
Emergency Response Guide Number: 128
XV. REGULATORY INFORMATION
UNITED STATES:
Toxic Substances Control Act (TSCA): The components of this product are listed on the TSCA Inventory of
Existing Chemical Substances.
Pesticide acceptance indication: US EPA Registration Number: Not applicable
Superfund Amendments and Reauthorization Act (SARA) Title III:
Hazard Categories Sections 311/312 (40 CFR 370.2):
Health: Acute
Chronic
Physical: Fire
Emergency Planning & Community Right to Know (40 CFR 355, App. A):
Extremely Hazardous Substance Section 302 - Threshold Planning Quantity:
Not applicable
Reportable Quantity (40 CFR 302.4):
Benzene, dimethyl- final RQ = 100 pounds (45.4 kg)
Ethyl benzene final RQ = 1000 pounds (454 kg)
Supplier Notification Requirements (40 CFR 372.45), 313 Reportable Components
Xylene (mixed isomers) form R reporting required for 1.0% de minimis concentration
Ethyl benzene form R reporting required for 1.0% de minimis concentration
Clean Air Act Socmi: Xylenes (nos)
Ethyl benzene
Clean Air Act Organic HAP 40 CFR Section 61.01(b) Xylenes (nos)
Ethyl benzene
Clean Air Act VOC Section 111 Xylenes (nos)
Ethyl benzene
Clean Air Act Haz. Air Pollutants Section 112 Xylenes (isomers and mixture)
Ethyl benzene,
State Right-to-Know Regulations Status of Ingredients
Pennsylvania: Benzene, dimethyl-
Benzene, ethyl-
Phenol, 2,6-bis(1,1-dimethylethyl)-4-methyl-
New Jersey: Xylenes (o-, m-, p- isomers)
Ethyl benzene
2,6-Di-tert-butyl-p-cresol
Massachusetts: Xylene, Ethyl benzene, Butylated hydroxytoluene (BHT)
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XVI. ADDITIONAL INFORMATION
MSDS REVISION Revised to meet the ANSI standard of 16 sections.
STATUS:
MAJOR REFERENCES:
?Shimizu, H. et al. 1985. The Results of Microbial Mutation Test for Forty-Three Industrial Chemicals.
Jpn. J. Ind. Health. Vol. 27. pp. 400-419.
?Zeiger, E. et al. 1987. Salmonella Mutagenicity Tests: 3. Results from the Testing of 255 Chemicals.
Environmental Mutagenesis. Journal of the Environmental Mutagen Society. Volume 9, Supplement 9:1-
110. Alan R. Liss, Inc. NY.
?Criteria Document: Recommendations for an Occupational Exposure Standard for Xylene. 1975. U.S.
Department of Health, Education, and Welfare. National Institute for Occupational Safety and Health.
HEW Publication No. (NIOSH) 75-168.
?National Toxicology Program. Toxicology and Carcinogenesis Studies of Xylenes (Mixed) in F344/N Rats
and B6C3F1 Mice. U. S. Department of Health and Human Services. Research Triangle Park, NC. 1986.
Other references available upon request.
THIS MATERIAL SAFETY DATA SHEET (MSDS) HAS BEEN PREPARED IN COMPLIANCE WITH THE FEDERAL OSHA
HAZARD COMMUNICATION STANDARD, 29 CFR 1910.1200. THE INFORMATION INTHIS MSDS SHOULD BE
PROVIDEDTO ALL WHO WILL USE, HANDLE, STORE, TRANSPORT, OR OTHERWISE BE EXPOSED TO THIS PRODUCT.
THIS INFORMATION HAS BEEN PREPARED FOR THE GUIDANCE OF PLANT ENGINEERING, OPERATIONS AND
MANAGEMENT AND FOR PERSONS WORKING WITH OR HANDLING THIS PRODUCT. ARCH CHEMICALS BELIEVES
THIS INFORMATION TO BE RELIABLE AND UP TO DATE AS OF THE DATE OF PUBLICATION BUT, MAKES NO
WARRANTY THAT IT IS. ADDITIONALLY, IF THIS MSDS IS MORE THAN THREE YEARS OLD, YOU SHOULD CONTACT
ARCH CHEMICALS MSDS CONTROL AT THE PHONE NUMBER ON THE FRONT PAGE TO MAKE CERTAIN THAT THIS
DOCUMENT IS CURRENT.
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