094813
DOD Hazardous Materials Information System
DoD 6050.5-L
AS OF July 1998
FSC: 6850
NIIN: 00N064608
Manufacturer's CAGE: 02687
Part No. Indicator: A
Part Number/Trade Name: AZ 1518 PHOTORESIST
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General Information
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Item Name:
Company's Name: HOECHST CELANESE
Company's Street: 70 MEISTER AVE
Company's P. O. Box: 3700
Company's City: SOMERVILLE
Company's State: NJ
Company's Country: US
Company's Zip Code: 08876-1258
Company's Emerg Ph #: 800-835-5235;800-424-9300(CHEMTREC)
Company's Info Ph #: 800-235-2637
Distributor/Vendor # 1:
Distributor/Vendor # 1 Cage:
Distributor/Vendor # 2:
Distributor/Vendor # 2 Cage:
Distributor/Vendor # 3:
Distributor/Vendor # 3 Cage:
Distributor/Vendor # 4:
Distributor/Vendor # 4 Cage:
Safety Data Action Code:
Safety Focal Point: N
Record No. For Safety Entry: 001
Tot Safety Entries This Stk#: 001
Status: SMJ
Date MSDS Prepared: 04AUG89
Safety Data Review Date: 06OCT95
Supply Item Manager:
MSDS Preparer's Name:
Preparer's Company:
Preparer's St Or P. O. Box:
Preparer's City:
Preparer's State:
Preparer's Zip Code:
Other MSDS Number:
MSDS Serial Number: CBVXY
Specification Number:
Spec Type, Grade, Class:
Hazard Characteristic Code:
Unit Of Issue:
Unit Of Issue Container Qty:
Type Of Container:
Net Unit Weight:
Report for NIIN: 00N064608
NRC/State License Number:
Net Explosive Weight:
Net Propellant Weight-Ammo:
Coast Guard Ammunition Code:
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Ingredients/Identity Information
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094813
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Proprietary: NO
Ingredient: ACETIC ACID, 2-METHOXY-1-METHYLETHYL ESTER; (PROPYLENE GLYCOL
MONOMETHYL ETHER ACETATE) LD50(ORAL,RAT):8.5 G/KG(ING 2)
Ingredient Sequence Number: 01
Percent: 70
Ingredient Action Code:
Ingredient Focal Point: N
NIOSH (RTECS) Number: AI8925000
CAS Number: 108-65-6
OSHA PEL: N/K (FP N)
ACGIH TLV: N/K (FP N)
Other Recommended Limit: N/K
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Proprietary: NO
Ingredient: ING 1:MALE, 10.0 G/KG FEMALE
Ingredient Sequence Number: 02
Percent: N/K
Ingredient Action Code:
Ingredient Focal Point: N
NIOSH (RTECS) Number: 9999999ZZ
CAS Number:
OSHA PEL: N/K (FP N)
ACGIH TLV: N/K (FP N)
Other Recommended Limit: N/K
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Proprietary: NO
Ingredient: CRESOL NOVOLAK RESIN
Ingredient Sequence Number: 03
Percent: N/K
Ingredient Action Code:
Ingredient Focal Point: N
NIOSH (RTECS) Number: 1006077CN
CAS Number: 117520-84-0
OSHA PEL: N/K (FP N)
ACGIH TLV: N/K (FP N)
Other Recommended Limit: N/K
-------------------------------------
Proprietary: NO
Ingredient: 2,1,5-DIAZONAPHTHAALOQUINONE SULFONIC ACID ESTERS WITH 2,3,4-
TRIHYDROXY BENZOPHENONE
Ingredient Sequence Number: 04
Percent: N/K
Ingredient Action Code:
Ingredient Focal Point: N
NIOSH (RTECS) Number: 1006192DS
CAS Number: 68510-93-0
Report for NIIN: 00N064608
OSHA PEL: N/K (FP N)
ACGIH TLV: N/K (FP N)
Other Recommended Limit: N/K
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Physical/Chemical Characteristics
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Appearance And Odor: AMBER TO DARK RED LIQUID, CHARACTERISTIC ODOR.
Boiling Point: 273F,134C
Melting Point: N/K
Vapor Pressure (MM Hg/70 F): N/K
Vapor Density (Air=1): N/K
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094813
Specific Gravity: 1.06 (H*2O=1)
Decomposition Temperature: N/K
Evaporation Rate And Ref:
Solubility In Water: FORMS TWO LAYERS
Percent Volatiles By Volume: 70
Viscosity:
pH: N/K
Radioactivity:
Form (Radioactive Matl):
Magnetism (Milligauss):
Corrosion Rate (IPY): N/K
Autoignition Temperature:
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Fire and Explosion Hazard Data
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Flash Point: 119F,48C
Flash Point Method: PMCC
Lower Explosive Limit: N/K
Upper Explosive Limit: N/K
Extinguishing Media: CARBON DIOXIDE, WATER, ALCOHOL FOAM OR DRY CHEMICAL.
Special Fire Fighting Proc: WEAR NIOSH/MSHA APPROVED SCBA & FULL
PROTECTIVE EQUIPMENT (FP N). USE WATER SPRAY TO COOL DRUMS IN FIRE AREA.
Unusual Fire And Expl Hazrds: SOLVENT VAPORS. SEE HAZARDOUS INGREDIENTS
AND HEALTH HAZARD INFORMATION. EMITS TOXIC FUMES UNDER FIRE CONDITIONS.
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Reactivity Data
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Stability: YES
Cond To Avoid (Stability): AVOID CONTACT WITH OXIDIZING AGENTS, STRONG
ACIDS AND ALKALINE MATERIALS.
Materials To Avoid: NONE SPECIFIED BY MANUFACTURER.
Hazardous Decomp Products: THERMAL DECOMP MAY GENERATE CARBON DIOXIDE,
CARBON MONOXIDE & OXIDES OF NITROGEN & SULFUR AS WELL AS VOLAT ORG
RESIDUES.
Hazardous Poly Occur: NO
Conditions To Avoid (Poly): NOT RELEVANT
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Health Hazard Data
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LD50-LC50 Mixture: SEE INGREDIENTS
Route Of Entry - Inhalation: YES
Route Of Entry - Skin: YES
Report for NIIN: 00N064608
Route Of Entry - Ingestion: YES
Health Haz Acute And Chronic: PGMEA CAN CAUSE SKIN, EYE AND RESPIRATORY
IRRITATION. EXTREME OR PROLONGED EXPOSURE MAY CAUSE GASTRIC AND CENTRAL
NERVOUS SYSTEM EFFECTS. PGMEA IS READILY ABSORBED THROUGH INTACT SKIN.
Carcinogenicity - NTP: NO
Carcinogenicity - IARC: NO
Carcinogenicity - OSHA: NO
Explanation Carcinogenicity: NOT RELEVANT
Signs/Symptoms Of Overexp: SEE HELATH HAZARDS.
Med Cond Aggravated By Exp: PREEXISTING SKIN, EYE AND RESPIRATORY
CONDITIONS MAY BE AGGRAVATED.
Emergency/First Aid Proc: INHAL:REMOVE TO FRESH AIR. CONSULT MD IF IRRIT
OCCURS. ADMIN OXYG IF THERE IS DFCLTY IN BRTHG. EYE:FLUSH THORO W/ WATER
FOR @ LST 15 MIN. GET IMMED MED HELP. SKIN:IMMED REMOVE CONTAM CLTHG & WASH
AFFECTED AREA THORO W/SOAP & WATER. CONSULT MD IF EXPOS IS EXTENSIVE OR
IRRIT OCCURS. INGEST:IF CONSCIOUS, GIVE WATER OR MILD TO DILUTE STOMACH
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CONTENTS. CONSULT MD.
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Precautions for Safe Handling and Use
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Steps If Matl Released/Spill: WEAR APPROP PERSONAL PROT EQUIP, CONTAIN
SPILL, VENT AREA OF SPILL OR LEAK. REMOVE ALL SPARKING DEVICES OR IGNITION
SORUCES. COLLECT ONTO INERT ABSORBENT. PLACE IN SUITABLE CONTAINER.
Neutralizing Agent: NONE SPECIFIED BY MANUFACTURER.
Waste Disposal Method: DISPOSAL MUST BE I/A/W FEDERAL, STATE & LOCAL
REGULATIONS (FP N). DISPOSE OF OR INCINERATE IN ACCORDANCE WITH
REGULATIONS. LISTED AS A HAZARDOUS SUBSTANCE, AS DEFINED IN THE
COMPREHENSIVE ENVIRONMENTAL RESPONSE, COMPENSATION & LIABILITY ACT OF 1980.
Precautions-Handling/Storing: STORE @ 30-70F. KEEP AWAY FROM HEAT, SPKS &
FLAME. STORE IN ORIGINAL CNTNR. TRANSPORT & STORE UNDER DRY CNDTNS TIGHTLY
CLSD & PROT FROM LIGHT.
Other Precautions: PRESS MAY BUILD UP SLOWLY IN CLSD CNTNRS DUE TO GRADUAL
DECOMP. THIS IS ACCELERATED BY HEAT & LIGHT W/POSS LIBERATION OF COMBUST
SOLV VAPS. ING 4 MAY SUBLIME TO SURFS W/IN HEATING EQUIP UNDER CNDTNS OF
HIGH TEMP, MIN VENTING & LG (SUP DAT)
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Control Measures
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Respiratory Protection: NIOSH/MSHA APPROVED CHEMICAL CARTRIDGE RESPIRATOR
RECOMMENDED FOR EXPOSURES EXCEEDING TLV.
Ventilation: USE LOCAL EXHAUST VENTILATION.
Protective Gloves: RUBBER GLOVES.
Eye Protection: ANSI APPROVED CHEM WORKERS GOGGS (FP N).
Other Protective Equipment: ANSI APPROVED EMERGENCY EYE WASH AND DELUGE
SHOWER (FP N). CLOTHING SUITABLE TO PREVENT SKIN CONTACT.
Work Hygienic Practices: NONE SPECIFIED BY MANUFACTURER.
Suppl. Safety & Health Data: OTHER PREC:THROUGHPUT. SUGGESTED CLEANUP IS
W/AQUEOUS BASIC PHOTORESIST DEVELOPER FOLLOWED BY THORO RINSE. AVOID SKIN
CONT/INHAL OF DUSTS & VAPS. ING 4 IS NOT LISTED AS HAZ WASTE. IT IS AN
IRRIT & POSS MUTAGEN. CONTACT LENSES SHOULD NOT BE WORN WHEN WORKING WITH
THIS CHEMICAL.
Report for NIIN: 00N064608
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Transportation Data
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Transportation Action Code:
Transportation Focal Point:
Trans Data Review Date:
DOT PSN Code:
DOT Symbol:
DOT Proper Shipping Name:
DOT Class:
DOT ID Number:
DOT Pack Group:
DOT Label:
DOT/DoD Exemption Number:
IMO PSN Code:
IMO Proper Shipping Name:
IMO Regulations Page Number:
IMO UN Number:
IMO UN Class:
IMO Subsidiary Risk Label:
IATA PSN Code:
IATA UN ID Number:
IATA Proper Shipping Name:
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094813
IATA UN Class:
IATA Subsidiary Risk Class:
IATA Label:
AFI PSN Code:
AFI Symbols:
AFI Prop. Shipping Name:
AFI Class:
AFI ID Number:
AFI Pack Group:
AFI Label:
AFI Special Prov:
AFI Basic Pac Ref:
MMAC Code:
N.O.S. Shipping Name:
Additional Trans Data:
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Disposal Data
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Disposal Data Action Code:
Disposal Data Focal Point:
Disposal Data Review Date:
Rec # For This Disp Entry:
Tot Disp Entries Per NSN:
Landfill Ban Item:
Disposal Supplemental Data:
1st EPA Haz Wst Code New:
1st EPA Haz Wst Name New:
1st EPA Haz Wst Char New:
1st EPA Acute Hazard New:
2nd EPA Haz Wst Code New:
Report for NIIN: 00N064608
2nd EPA Haz Wst Name New:
2nd EPA Haz Wst Char New:
2nd EPA Acute Hazard New:
3rd EPA Haz Wst Code New:
3rd EPA Haz Wst Name New:
3rd EPA Haz Wst Char New:
3rd EPA Acute Hazard New:
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Label Data
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Label Required: YES
Technical Review Date: 06OCT95
Label Date:
MFR Label Number:
Label Status: G
Common Name: AZ 1518 PHOTORESIST
Chronic Hazard: NO
Signal Word: WARNING!
Acute Health Hazard-None:
Acute Health Hazard-Slight:
Acute Health Hazard-Moderate: X
Acute Health Hazard-Severe:
Contact Hazard-None:
Contact Hazard-Slight: X
Contact Hazard-Moderate:
Contact Hazard-Severe:
Fire Hazard-None:
Fire Hazard-Slight:
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094813
Fire Hazard-Moderate: X
Fire Hazard-Severe:
Reactivity Hazard-None: X
Reactivity Hazard-Slight:
Reactivity Hazard-Moderate:
Reactivity Hazard-Severe:
Special Hazard Precautions: COMBUSTIBLE. ACUTE:PGMEA CAN CAUSE SKIN, EYE
AND RESPIRATORY IRRITATION. EXTREME OR PROLONGED EXPOSURE MAY CAUSE GASTRIC
AND CENTRAL NERVOUS SYSTEM EFFECTS. PGMEA IS READILY ABSORBED THROUGH
INTACT SKIN. CHRONIC:NONE LISTED BY MANUFACTURER.
Protect Eye: Y
Protect Skin: Y
Protect Respiratory: Y
Label Name: HOECHST CELANESE
Label Street: 70 MEISTER AVE
Label P.O. Box: 3700
Label City: SOMERVILLE
Label State: NJ
Label Zip Code: 08876-1258
Label Country: US
Label Emergency Number: 800-835-5235;800-424-9300(CHEMTREC)
Year Procured:
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