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MSDS Material Safety Data Sheet
CAS

108-65-6 108-94-1 107-98-2

File Name: 108-65-6_108-94-1_107-98.asp

                                 Material Safety
Page 1 of 7
Rev.1
Data Sheet
Section 1 - Product and Company Identification
Product name Photo-Resist Detergent (EZ-300)
Other names--
Product usePhoto-Resist Clean Solvent
Supplier's nameSan Fu Chemical Co., Ltd., Shan Hua Plant
Supplier's address340 Hsiao Hsin Li, Shan Hua Town, Tainan Hsien, Taiwan, R.O.C.
Supplier's phone06-5837608 Emergency phone06-5837608
FAX.06-5839498


Section 2 - Hazards Identification
Classification
1. Flammable liquids Category 3
2. Serious Eye Damage/Eye Irritation Category 2
The Most Important Hazards and effect
Label element
Hazard symbol Flame, Exclamation Mark




Signal wordWarning
Hazard statement
1. Flammable liquid and vapor
2. Harmful while contacting with skin
3. Cause eye irritation
Precautionary statement
1. Place in the well-ventilated area.
2. Keep away from sources of ignition-No smoking.
3. Avoid contact with eye.
4. Do not inhale the gas/ smoke/vapor/fog.
5. Wear proper protective clothing, gloves, goggles/ face shield.
Others Hazard--


Section 3 - Composition/Information On Ingredients
Mixture
Concentration or concentration
Component or impurities
CAS No.
range%
contributing to the hazard
Propylene Glycol mono-methyl 55~75% 108-65-6
ether Acetate, PGMEA
Cyclohexanone 10 - 40% 108-94-1
Propylene Glycol mono-methyl
30 ?20% 107-98-2
ether
Additives --
2%
Material Safety
Page 2 of 7
Rev.1
Data Sheet

Section 4 - First Aid Measures
The First-aid Information
inhalationRemove to fresh air. If not breathing, give artificial respiration. If breathing is
difficult, administer oxygen. Get medical help.
skin contactGet medical aid. Flush skin with plenty of water for at least 15 minutes while
removing contaminated clothing and shoes. Clean thoroughly before re-wear the
contaminated clothing.
eye contactFlush eyes with plenty of water for at least 15 minutes, occasionally lifting the
upper and lower eyelids. Get medical aid.
IngestionIf swallowed, drink water, and seek medical attention. Do not induce vomiting if
patient is unconscious.
The Most Important Symptoms and Hazardous Effectsmay cause headaches, nausea,
unconsciousness and other central nervous system effects.
Protection of First-aiderswear Level C protective clothing.
Notes to a Physicianconsider gastric lavage if swallowed


Section 5 - Fire Fighting Measures
Extinguishing Mediacarbon dioxide, chemical powder, alcohol foam
Specific Hazards when Fire-fight
For small (incipient) fires, use media such as "alcohol" foam, dry chemical, or carbon dioxide.
For large fires, apply water from as far as possible. Use very large quantities (flooding) of water
applied as a mist or spray; solid streams of water may be ineffective. Cool all affected containers
with flooding quantities of water.
Specific Fire-fighting Procedure
1. Keep people away.
2. Isolate fire and deny unnecessary entry.
3. Stay upwind. Keep out of low areas where gases (fumes) can accumulate.
4. Water may not be effective in extinguishing fire.
5. Stay away from both end of the containers.
6. Use water spray to cool fire exposed containers and fire-affected zone until fire is out.
7. Fight fire from protected location or safe distance.
8. Consider the use of unmanned hose holders or monitor nozzles.
9. Immediately withdraw all personnel from the area in case of rising sound from venting
safety device or discoloration of the container.
10. Burning liquids may be extinguished by dilution with water.
11. Do not use direct water stream. May spread fire.
12. Eliminate ignition sources.
13. Move container from fire area if this is possible without hazard.
14. Burning liquids may be moved by flushing with water to protect personnel and minimize
property damage.
15. Evacuation radius: 800 meters (1/2 mile).
Specific Protection of Firefighters
1. Wear positive-pressure self-contained breathing apparatus (SCBA) and protective fire
fighting clothing (includes fire fighting helmet, coat, trousers, boots, and gloves).
Material Safety
Page 3 of 7
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Data Sheet
2. If protective equipment is not available or not used, fight fire from a protected location or
safe distance.
3. Appropriate warning to the cleaners.

Section 6 - Accidental Release Measures
Personal Precautions
1. Changing into street clothing after work is desirable.
2. Use appropriate safety equipments.
3. Wash hands and clothing thoroughly after handling.
Environmental Precautions
1. Isolate area. Keep well ventilation.
2. Eliminate all sources of ignition in vicinity of spill or released vapor to avoid fire or
explosion. Vapor explosion hazard.
3. Keep out of sewers. Check area with combustible gas detector before reentering area.
4. Prevent from entering into soil, ditches, sewers, waterways and/or groundwater.
Methods for Cleaning up
1. Small spills: Absorb with materials such as sand vermiculite. Collect in suitable and
properly labeled containers.
2. Large spills: Dike for later disposal.
3. Pump with explosion-proof equipment.
4. If available, use foam to smother or suppress.
5. Pump into suitable and properly labeled containers.

Section 7 - Handling and Storage
Handling
1. Avoid contact with eyes, skin, and clothing.
2. Keep away from heat, sparks and flame.
3. Avoid breathing vapor or mist.
4. Operate in a well-ventilated place.
5. Do not use plastic containers.
6. Use only spark-proof tools.
7. While handling, do not eat, drink or smoke. ?br> 8. Avoid electro-static discharge.
Storage
1. Keep away from heat, sparks, and flame.
2. Keep away from sources of ignition.
3. Prevent vapor accumulation.
4. Store in a cool, dry place.
5. Keep container closed when not in use.
6. Protect from physical damage.

Section 8 - Exposure Controls & Personal Protection
Engineering measures
Ventilation: Provide general and/or local exhaust ventilation to control airborne levels below the
exposure guidelines.
Material Safety
Page 4 of 7
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Data Sheet
Control parameters
TWA STEL Ceiling Biological standards
-- -- -- --
Personal protective equipment
Respiratory Protection
1. Atmospheric levels should be maintained below the exposure guideline.
2. When respiratory protection is required, use an approved air-purifying or
positive-pressure supplied-air respirator depending on the potential airborne
concentration.
3. For emergency and other conditions where the exposure guideline may be exceeded, use
an approved positive-pressure self-contained breathing apparatus or positive-pressure air
line with auxiliary self-contained air supply. In confined or poorly ventilated areas, use
an approved self-contained breathing apparatus or positive pressure air line with
auxiliary self-contained air supply. The following should be effective types of
air-purifying respirators: Organic vapor cartridge.
Hand Protection
1. Use gloves chemically resistant to this material when prolonged or frequently repeated
contact could occur. Examples of preferred glove barrier materials include: Butyl rubber.
Polyethylene. Chlorinated polyethylene. Ethyl vinyl alcohol laminate ("EVAL").
2. Examples of acceptable glove barrier materials include: Viton.
3. Natural rubber ("latex").
4. Polyvinyl chloride ("PVC" or "vinyl").
5. Nitrile/butadiene rubber ("nitrile" or "NBR").
Eye Protection
1. Use safety glasses.
Skin and Body Protection
1. When prolonged or frequently repeated contact could occur, use protective clothing
chemically resistant to this material.
2. Selection of specific items such as faceshield,boots, apron, or full-body suit will depend
on the task. Remove contaminated clothing immediately, wash skin area with soap and
water, and launder clothing before reuse or dispose of properly.
Hygiene measures
Handle in accordance with good industrial hygiene and safety practice.
Wash hands before breaks and at the end of workday.
No smoking and drinking in work area.

Section 9 - Physical & Chemical Properties
Appearanceclear liquid Odoracetate -like
Colorcolorless Melting Point: --
pH value4 Boiling point/boiling range 146
Flash point47
Flammability: --
Decomposition temp-- Test methodClosed cup
Auto ignition temp272 Explosion properties1.5%10%
Vapor pressure3.8 mmHg @25 Vapor density4.6
Material Safety
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Data Sheet
Density0.966 @25 Solubility220g/100g water@20
log Kow/ Evaporation Rate0.4


Section 10 - Stability & Reactivity Data
StabilityThermally stable at typical use temperatures.
Possible hazardous reactions under specific conditionsMay react with oxidants causing fire and
explosion hazard
Conditions to avoid
1. Keep away from heat, static electricity, sparks, sunlight and moisture.
2. Do not distill to dryness. Product can oxidize at elevated temperatures. Generation of gas
during decomposition can cause pressure in closed systems.
Materials to avoidStrong acids, strong bases, or strong oxidizers.
Hazardous decomposition products--


Section 11 - Toxicological Information
Route of exposureSkin, inhalation, ingestion, eyes
Symptoms--
Immediate Toxicity
1. Inhalation
1.1 The vapor will cause uncomfortable to the upper respiratory tract and lungs.
1.2 The danger of inhalation will increase if temperature is high.
1.3 The acute effects of inhalation under the high concentration are chest and nose
irritation, coughing, sneezing, headache and nausea.
1.4 Expose in the high humiliated environment may cause coma, unconsciousness, shock
or death.
1.5 CNS depression include general uncomfortable, dizziness, headache, anesthesia,
slow response, slurred speech and loss of consciousness.
1.6 Severe poisoning may cause respiratory depression and death.
2. Skin
2.1 Long term exposure may cause skin gently illness, and may cause skin reaction and
dryness.
2.2 Will aggressive the symptoms of the skin illness.
2.3 Repeat exposure for 2 weeks will cause skin inflammation and peel off.
3. Eye
3.1 Dust and the water of the eye will react and generate into hydrochloric acid. It will
cause redness, pain, tearing and blurred vision to the eyes.
3.2 Severe irritation to the rabbit eyes with 50g of this substance.
3.3 This substance cause highly uncomforted to the eyes with tearing, pain and severe
conjunctivitis.
3.4 If no proper and immediately manage, cornea damage may develop into permanent
vision injury.
3.5 May cause severe irritation and inflammation to the eyes.
4. Ingestion
4.1 Cause uncomforted and harmful while swallowed.
Material Safety
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Data Sheet
4.2 Cause nausea, stomach irritation, pain and vomit.
4.3 Reverse inhalation to the lungs may cause deathly waste swollen, respiratory failure
and even cardiac arrest and death.
LD50: 8532 mg/kgOral, Rat
LC50: 4345 ppm/6HInhalation, Rat
Specific effects--


Section 12 - Ecological Information
Ecotoxicology --
LC50(fish)5000g/L/24 yr (Petromyzon marinus)
EC50(Aquatic Invertebrates)--
Bioconcentration factor (BCF)--
Persistence and degradability --
Half-Life (Air)--
Half-Life (Water surface)--
Half-Life (Groundwater)--
Half-Life (Soil)--
Bioaccumulative potential--
Mobility in soil--
Other adverse effects--


Section 13 - Disposal Considerations
Methods of disposal
1. Contact a licensed professional waste disposal service to dispose of this material.
2. Burn in a chemical incinerator equipped with an afterburner and scrubber.
3. Observe all federal, state, and local Environmental regulations.

Section 14 - MSDS Transport Information
UN classification number1993
Proper D.O.T Shipping NameFlammable liquids
Hazard ClassFlammable liquid Category 3
Packing Group
Marine pollutionnone
Specific precautionary transport measures and conditions--


Section 15 - Regulatory Information
Regulations
1. Regulations for Labor Safety and Health Installations
2. Regulations for Chemical Hazard Communication
3. Permissible Exposure Limits of Hazardous Substances in the Work Environment.
4. Road Traffic Safety Regulations
5. Industrial Waste Storage and Disposal Regulations
Material Safety
Page 7 of 7
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Data Sheet
6. Public Hazardous Materials and Flammable Pressurized Gases Establishment Standards and
Safety Control Regulations.
7. Ordinance on Prevention of Organic Solvent Poisoning
8. Facility Standards

Section 16 - Other Information
1. CHEMINFO Database, CCINFO CD-ROM, 2005-2
2. RTECS Database, TOMES PLUS CD-ROM, Vol. 63-2005, Vol. 71-2007
Literature
3. HSDB Database, TOMES PLUS CD-ROM, Vol. 63-2005, Vol. 71-2007
references
4. CHEMWATCH Database, 2007-1
5. GHS MSDS Database, 2007
SupplerSan Fu Chemical Co., Ltd. Shan Hua Plant
Address340 Hsiao Hsin Li, Shan Hua Town, Tainan Hsien, Taiwan, R.O.C.
Prepared by
TEL06-5837608 FAX06-5839498
NameChunfel Chang
Issue date 2008/8/31 Revision 1
Symbols Explanations:
"--" No information is available at this time.
Remarks
"/" Not applicable to this substance.

This information above is believed to be accurate and represents the best information
currently available to us. However, we make no warranty of merchantability or any other
warranty, expressed or implied, with respect to such information, and we assume no liability
resulting from its use. Users should make their own investigation to determine the suitability
of the information for their particular purposes. In no event shall San Fu liable for any claims,
losses, or damages of any third party or for lost profits or any special, indirect, incidental,
consequential, or exemplary damages howsoever arising, even if San Fu has been advised of
the possibility of such damages.

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