1254 Chestnut Street
Newton, MA 02464-1418
Tel: (617) 965-5511
Fax: (617) 965-5818
MATERIAL SAFETY DATA SHEET PAGE 1
August 22, 2006
SECTION 1. CHEMICAL IDENTIFICATION ---------------------------------------------------------
CHEMICAL NAME: Organic Resin Solution
KMPR?Series Resists
TRADE NAME:
PRODUCT #: See Table 1 ?Section 9
SECTION 2. COMPOSITION-----------------------------------------------------------------------------
INGREDIENTS: Cyclopentanone (CAS: 120-92-3); 20-60%.
Mixed Triarylsulfonium/ Hexafluoroantimonate Salt;
(CAS: 109037-75-4); 1-5%
Propylene Carbonate (CAS: 108-32-7); 1-5%
Modified Epoxy Resin (CAS: Proprietary); 40-80%
SECTION 3. HAZARD DATA----------------------------------------------------------------------------
INFLAMMABILITY: Flammable liquid.
SKIN CONTACT: Irritant.
EYE CONTACT: Severe eye irritant.
INGESTION: Harmful if ingested.
INHALATION: Harmful if inhaled.
MUTAGENICITY: Not known to be mutagenic.
CARCINOGENICITY: Not considered carcinogenic by NTP, IARC and OSHA
TARGET ORGANS: Eyes, Epidermis, Nervous System
SECTION 4. FIRST AID MEASURES-------------------------------------------------------------------
INHALATION: Inhalation is not an expected route of exposure. If respiratory irritation or
distress occurs remove victim to fresh air. Seek medical attention if
respiratory irritation or distress continues.
INGESTION: If victim is conscious and alert, give 2-3 glasses of water to drink and
induce vomiting by touching back of throat with a finger. Do not induce
vomiting or give anything by mouth to an unconscious person. Seek
immediate medical attention. Do not leave victim unattended. Vomiting
may occur spontaneously. To prevent aspiration of swallowed product, lay
victim on side with head lower than waist. If vomiting occurs and the
victim is conscious, give water to further dilute the chemical.
SKIN CONTACT: In case of contact, immediately wash with plenty of soap and water for at
least 5 minutes. Seek medical attention. Remove contaminated clothing
and shoes. Clean contaminated clothing and shoes before re-use.
EYE CONTACT: Hold eyelids open and flush with a steady, gentle stream of water for at
least 15 minutes. Seek medical attention.
MATERIAL SAFETY DATA SHEET PAGE 2
22 August 2006
CHEMICAL NAME: Organic Resin Solution
KMPR?Series Resists
TRADE NAME:
PRODUCT #: See Table 1 ?Section 9
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SECTION 5. FIRE FIGHTING MEASURES-----------------------------------------------------------
EXTINGUISHING
MEDIA: Dry chemical, carbon dioxide, alcohol foam, and universal
foam.
SPECIAL FIRE FIGHTING
PRECAUTIONS: Firefighters should wear NIOSH/MSHA approved self-
contained breathing apparatus and full protective clothing.
Remove all ignition sources if it can be done safely.
UNUSUAL FIRE OR
EXPLOSION HAZARDS: Product will burn under fire conditions. Containers may
explode (due to build-up of pressure) when exposed to extreme
heat. Vapors may travel a considerable distance to a source of
ignition and flash back along vapor trail.
SECTION 6. ACCIDENTAL RELEASE PROCEDURES -------------------------------------------
EVACUATION
PROCEDURES & SAFETY: Wear appropriate protective gear for the situation. See
Personal Protection information in Section 8.
CLEANUP & DISPOSAL
OF SPILL: Absorb with an inert absorbent. Sweep up and place in an
appropriate closed container (see Section 7). Clean up residual
material by washing area with water. Collect washings for
disposal.
ENVIRONMENTAL &
REGULATORY REPORTING: Do not flush to drain. If required proper authorities should be
notified.
SECTION 7. STORAGE AND HANDLING PRECAUTIONS---------------------------------------
STORAGE: Store in tightly closed container in a cool, dry, well-ventilated
environment away from direct sunlight and ignition sources.
Recommended container materials are polyethylene or glass.
HANDLING: Use only under yellow light.
Keep away from heat, sparks, and flames.
Use only with mechanical exhaust.
Do not contact with skin, eyes, and clothing. Severe eye irritant.
Avoid prolonged or repeated contact with skin.
Do not breathe vapors or mist.
Wear heavy rubber gloves.
Wash with soap and water after handling.
Have safety shower and eye wash available.
Store and transfer under a blanket of dry inert gas.
_____________________________________________________________________________________________________
MicroChem Corp. 1254 Chestnut Street種ewton, MA 02464-1418稵el:(617)965-5511稦ax:(617)965-5818
MATERIAL SAFETY DATA SHEET PAGE 3
22 August 2006
CHEMICAL NAME: Organic Resin Solution
KMPR?Series Resists
TRADE NAME:
PRODUCT #: See Table 1 ?Section 9
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SECTION 8. EXPOSURE CONTROLS AND PERSONAL PROTECTION-----------------------
RESPIRATORY
PROTECTION: Under normal conditions, use of Air-purifying (half-mask/full-face)
respirator with cartridges/canisters approved for use against organic
vapors, dust, mists and fumes is recommended.
VENTILATION: General area dilution/exhaust ventilation.
SKIN PROTECTION: Skin contact should be minimized through the use of gloves and
suitable long-sleeved clothing.
EYE PROTECTION: Eye contact should be prevented through use of chemical safety
glasses with side shields or splash proof goggles.
SECTION 9. PHYSICAL AND CHEMICAL DATA--------------------------------------------------
APPEARANCE: Pale yellow to clear
ODOR: Slightly sweet
BOILING POINT: 130 篊 (266 篎)
SPECIFIC GRAVITY: see Table 1
VAPOR PRESSURE: 8.7 mm @ 20 篊 (68 篎)
H2O SOLUBILITY: Slightly soluble
% VOLATILES: see Table 1
EVAPORATION RATE: 1 (BuAc=1)
FLASH POINT: 30 篊 (86 篎) TCC
AUTOIGNITION TEMP: 550 篊 (1022 篎)
EXPLOSION LIMITS: 1.3 lower (vol./vol. %)
Unk. upper)
SbF Salt (% by wt): see Table 1
Sb (% by wt): see Table 1
Table 1
Name Product# Specific Volatiles VOC SbF6 Salt Sb
Gravity (% by wt.) (g/L) (% by wt) (% by wt)
KMPR 1005 Y211045 1.16 54-56 550 2.2 <1.0 %
KMPR 1010 Y211055 1.18 44-46 450 2.5 <1.0 %
KMPR 1025 Y211064 1.20 35-37 360 3.0 <1.0%
KMPR 1035 Y211066 1.21 33-35 340 3.3 <1.0%
KMPR 1050 Y211067 1.22 32-35 340 3.3 <1.0%
_____________________________________________________________________________________________________
MicroChem Corp. 1254 Chestnut Street種ewton, MA 02464-1418稵el:(617)965-5511稦ax:(617)965-5818
MATERIAL SAFETY DATA SHEET PAGE 4
22 August 2006
CHEMICAL NAME: Organic Resin Solution
KMPR?Series Resists
TRADE NAME:
PRODUCT #: See Table 1 ?Section 9
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SECTION 10. REACTIVITY DATA -------------------------------------------------------------------
STABILITY: Stable
INCOMPATIBILITY: Strong Oxidizing Agents, Strong Bases, Strong Acids,
Strong Reducing Agents, Iron, Hydrazine
HAZARDOUS POLYMERIZATION: May occur. Avoid extreme pH.
HAZARDOUS COMBUSTION OR
DECOMPOSITION PRODUCTS: Oxides of carbon.
SECTION 11. TOXICITY HAZARDS-------------------------------------------------------------------
As Cyclopentanone:
Acute Eye Irritation: eye irritation, 100mg, rabbit. Severely irritating.
Acute Skin Irritation: skin irritation, 500mg, rabbit. Mildly irritating.
Acute Dermal Toxicity: LD50 ?lethal dose 50% of test species, >5000 mg/kg, rabbit.
Acute Respiratory Irritation: no test data found for product.
Acute Inhalation Toxicity: no test data found for product.
Acute Oral Toxicity: LD50 ?lethal dose 50% of test species, 1180 mg/kg, rat.
Mixed Triarylsulfonium/Hexafluoroantimonate Salt/Propylene Carbonate:
This material was mutagenic in the Ames bacterial assay. It is inactive, however, in the
in vivo mouse micronucleus test.
SECTION 12. ECOLOGICAL DATA--------------------------------------------------------------------
No data available at this time.
SECTION 13. DISPOSAL CONSIDERATIONS-------------------------------------------------------
Comply with applicable local, state or international regulations regarding the proper disposal of
this material and/or containers.
SECTION 14. TRANSPORTATION INFORMATION------------------------------------------------
HAZARD CLASSIFICATION: Flammable Liquid
SHIPPING NAME: Resin Solution
UN NUMBER: UN1866
PACKING GROUP III
_____________________________________________________________________________________________________
MicroChem Corp. 1254 Chestnut Street種ewton, MA 02464-1418稵el:(617)965-5511稦ax:(617)965-5818
MATERIAL SAFETY DATA SHEET PAGE 5
22 August 2006
CHEMICAL NAME: Organic Resin Solution
KMPR?Series Resists
TRADE NAME:
PRODUCT #: See Table 1 ?Section 9
-----------------------------------------------------------------------------------------------------------------------------------------
SECTION 15. REGULATORY INFORMATION------------------------------------------------------
EUROPEAN INFORMATION
EINECS LISTED
EC Nos: Cyclopentanone 204-435-9; Propylene Carbonate 203-572-1;
Mixed Triarylsulfonium/ Hexafluoroantimonate Salt 403-500-0
RISK & SAFETY PHRASES
R10 Flammable
R36/38 Irritating to eyes and skin
R43 May cause sensitization by skin contact
R50/53 Very toxic to aquatic organisms, may cause long-term adverse effects in the
aquatic environment
S2 Keep out of the reach of children
S23 Do not breathe gas/fumes/vapour/spray
S24 Avoid contact with the skin
S37 Wear suitable gloves
S60 This material and its container must be disposed of as hazardous waste
S61 Avoid release to the environment. Refer to special instructions/safety data sheets
INDICATIONS OF DANGER
Xi Irritant
N Environmentally Dangerous
US AND INTERNATIONAL INFORMATION
HAZARDOUS LISTINGS: All ingredients appear on the TSCA Inventory of
Chemical Substances or are compliant with TSCA
regulations, EINECS or are compliant with EINECS
regulations, and the Japan Hazardous Chemical Listing.
SARA Title III: This product IS NOT subject to SARA Title III, Section
313 Reporting Requirements.
Calif. SCAQMD Rule 443.1 VOC's: See Table 1 ?Section 9
SECTION 16. ADDITIONAL PRECAUTIONS AND COMMENTS-------------------------------
National Fire Protection Association Hazard Ratings ?NFPA:
2 Health Hazard Rating
3 Flammability Rating
0 Reactivity Rating
To the best of our knowledge, the above information is believed to be accurate but does
not claim to be all-inclusive and is intended to be used only as a guide. The supplier
makes no warranty of any kind, expressed or implied, concerning the use of this product
_____________________________________________________________________________________________________
MicroChem Corp. 1254 Chestnut Street種ewton, MA 02464-1418稵el:(617)965-5511稦ax:(617)965-5818
MATERIAL SAFETY DATA SHEET PAGE 6
22 August 2006
CHEMICAL NAME: Organic Resin Solution
KMPR?Series Resists
TRADE NAME:
PRODUCT #: See Table 1 ?Section 9
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and shall not be held liable for any damage resulting from handling or from contact with
the above product. User assumes all risks incident to its use.
MSDS Revision Information ?br>
A) Section 2 ?Changed CAS# for Modified epoxy resin from "not registered" to
"Proprietary".
B) Section 15 ?Added "or are compliant with TSCA regulations, EINECS or are
compliant with EINECS regulations," to the US and International
Information.
C) Added Registered Trademark symbol to KMPR name.
_____________________________________________________________________________________________________
MicroChem Corp. 1254 Chestnut Street種ewton, MA 02464-1418稵el:(617)965-5511稦ax:(617)965-5818
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