Material Safety Data Sheet
1. PRODUCT AND COMPANY IDENTIFICATION
MICROPOSIT(TM) STR(TM) 1045 Positive Photoresist
Revision date: 08/31/2004
Rohm and Haas Electronic Materials LLC
Supplier
455 Forest Street
Marlborough, MA 01752 United States of America
For non-emergency information contact: 508-481-7950
Emergency telephone number
Chemtrec 800-424-9300
Rohm and Haas Emergency 215-592-3000
2. COMPOSITION/INFORMATION ON INGREDIENTS
Component CAS-No. Concentration
Xylene 1330-20-7 1.0 - 5.0 %
Ethyl lactate 97-64-3 54.0 - 59.0 %
Aromatic resin 30.0 - 40.0 %
Butyl Acetate 123-86-4 1.0 - 5.0 %
Cresol 1319-77-3 0.01 - 0.99 %
Diazo Photoactive Compound 1.0 - 10.0 %
Organic Siloxane Surfactant 0.01 - 1.0 %
Ethylbenzene 100-41-4 0.1 - 0.5 %
3. HAZARDS IDENTIFICATION
Emergency Overview
Appearance
Form viscous liquid
Colour red
sweet
Odour
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CAUTION!
Hazard Summary
Combustible liquid and vapor. Causes irritation to eyes, nose, and
respiratory tract.
Prolonged, repeated contact, inhalation, ingestion, or absorption
through the skin, may cause toxic effects to internal organ systems
(liver, kidney, central nervous system).
Contains a material which may cause cancer.
Possible birth defect hazard.
Potential Health Effects
Inhalation, ingestion, eye and skin contact, absorption.
Primary Routes of Entry:
Eyes: May cause pain, transient irritation and superficial corneal effects.
Skin: Material may cause irritation.
Prolonged or repeated exposure may have the following effects:
defatting of skin leading to irritation and dermatitis
central nervous system depression
liver damage
kidney damage
blood disorders
adverse reproductive effects
Ingestion: Swallowing may have the following effects:
irritation of mouth, throat and digestive tract
headache
nausea
vomiting
Repeated doses may have the following effects:
central nervous system depression
liver damage
kidney damage
blood disorders
adverse reproductive effects
Inhalation: Inhalation may have the following effects:
irritation of nose, throat and respiratory tract
Higher concentrations may have the following effects:
systemic effects similar to those resulting from ingestion
Target Organs: Eye
Respiratory System
Skin
nervous system
Liver
kidney
Blood
Reproductive System
Carcinogenicity
ACGIH Not classifiable as a
Xylene
human carcinogen.
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IARC Classification not possible
Xylene
from current data.
IRIS Not classifiable.
Xylene
ACGIH Confirmed animal
Ethylbenzene
carcinogen with unknown
relevance to humans.
IARC Possible carcinogen.
Ethylbenzene
IRIS Not classifiable.
Ethylbenzene
4. FIRST AID MEASURES
Inhalation: Remove from exposure. If there is difficulty in breathing, give oxygen. Seek medical
attention if symptoms persist.
Skin contact: Wash skin with water. Continue washing for at least 15 minutes. Obtain medical
attention if blistering occurs or redness persists.
Eye contact: Immediately flush the eye with plenty of water for at least 15 minutes, holding the eye
open. Obtain medical attention if soreness or redness persists.
Ingestion: Wash out mouth with water. Have victim drink 1-3 glasses of water to dilute stomach
contents. Induce vomiting if person is conscious. Immediate medical attention is required Never
administer anything by mouth if a victim is losing conciousness, is unconcious or is convulsing.
Notes to physician
Treat symptomatically.
5. FIRE-FIGHTING MEASURES
39 - 40 癈 (102.9 - 104.9 癋 )
Flash point
No data available
Lower explosion limit
No data available
Upper explosion limit
Use water spray, foam, dry chemical or carbon dioxide.
Suitable extinguishing
Keep containers and surroundings cool with water spray.
media:
Specific hazards during fire fighting: This product may give rise to hazardous vapors in a fire.
Vapors can travel a considerable distance to a source of ignition and result in flashback.
Special protective equipment for fire-fighters: Wear full protective clothing and self-contained
breathing apparatus.
Further information: Pressure may build up in closed containers with possible liberation of
combustible vapors.
6. ACCIDENTAL RELEASE MEASURES
Personal precautions
Wear suitable protective clothing.
Wear respiratory protection.
Eliminate all ignition sources.
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Environmental precautions
Prevent the material from entering drains or water courses.
Do not discharge directly to a water source.
Advise Authorities if spillage has entered watercourse or sewer or has contaminated soil or vegetation.
Methods for cleaning up
Contain spills immediately with inert materials (e.g., sand, earth).
Transfer into suitable containers for recovery or disposal.
Finally flush area with plenty of water.
7. HANDLING AND STORAGE
Handling
Use local exhaust ventilation. Avoid contact with eyes, skin and clothing. Keep container tightly
closed.
Further information on storage conditions: Keep away from heat, sparks, flame, and other sources
of ignition. Practice good personal hygiene to prevent accidental exposure.
Storage
Storage conditions: Store in original container. Keep away from heat and sources of ignition.
Storage area should be: cool dry well ventilated out of direct sunlight
8. EXPOSURE CONTROLS / PERSONAL PROTECTION
Exposure limit(s)
Exposure limits are listed below, if they exist.
Component Regulation Type of listing Value
Xylene Rohm and Haas TWA 50 ppm
Rohm and Haas STEL 75 ppm
Rohm and Haas Absorbed via skin
ACGIH TWA 100 ppm
ACGIH STEL 150 ppm
OSHA_TRANS PEL 435 mg/m3 100 ppm
Z1A TWA 435 mg/m3 100 ppm
Z1A STEL 655 mg/m3 150 ppm
Component Regulation Type of listing Value
Ethyl lactate Rohm and Haas TWA 5 ppm
Rohm and Haas STEL 15 ppm
Component Regulation Type of listing Value
Butyl Acetate Rohm and Haas TWA 150 ppm
Rohm and Haas STEL 200 ppm
ACGIH TWA 150 ppm
ACGIH STEL 200 ppm
OSHA_TRANS PEL 710 mg/m3 150 ppm
Component Regulation Type of listing Value
Cresol ACGIH TWA 22 mg/m3 5 ppm
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ACGIH Skin
OSHA_TRANS PEL 22 mg/m3 5 ppm
OSHA_TRANS Skin
Component Regulation Type of listing Value
Ethylbenzene Rohm and Haas TWA 50 ppm
Rohm and Haas STEL 75 ppm
ACGIH TWA 434 mg/m3 100 ppm
ACGIH STEL 543 mg/m3 125 ppm
OSHA_TRANS PEL 435 mg/m3 100 ppm
Eye protection: goggles
Hand protection: Butyl rubber gloves. Other chemical resistant gloves may be recommended by your
safety professional.
Skin and body protection: Normal work wear.
Respiratory protection: Respiratory protection if there is a risk of exposure to high vapor
concentrations. The specific respirator selected must be based on the airborne concentration found in
the workplace and must not exceed the working limits of the respirator.
Engineering measures: Engineering methods to prevent or control exposure are preferred.
Methods include process or personnel enclosure, mechanical ventilation (local exhaust), and control of
process conditions.
9. PHYSICAL AND CHEMICAL PROPERTIES
Appearance
viscous liquid
Form
red
Colour
sweet
Odour
pH ca.7
>119 癈 (246 癋)
Boiling point/range
39 - 40 癈 (102.9 - 104.9 癋)
Flash point
No data available
Lower explosion limit
No data available
Upper explosion limit
Component: Ethyl lactate
1.7 mmHg at 20 癈
Vapour pressure
Component: n-Butyl acetate
15.0 mmHg at 25 癈
Vapour pressure
Heavier than air.
Relative vapour density
slightly soluble
Water solubility
1.09
Relative density
Slower than ether
Evaporation rate
685.32 g/l
VOC's
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NOTE: The physical data presented above are typical values and should not be construed as a
specification.
10. STABILITY AND REACTIVITY
Stable under normal conditions.
Hazardous reactions
High temperatures Static discharge
Conditions to avoid
Oxidizing agents bases acids
Materials to avoid
Carbon monoxide, carbon dioxide,
Hazardous
decomposition
products
Will not occur.
polymerization
11. TOXICOLOGICAL INFORMATION
Toxicological information on this product or its components appear in this section when such data is
available.
Component: Xylene
LD50 rat 4,300 mg/kg
Acute oral toxicity
Component: Ethyl lactate
LD50 rat >2,000 mg/kg
Acute oral toxicity
Component: n-Butyl acetate
LD50 rat 13,100 mg/kg
Acute oral toxicity
Component: Cresol
LD50 rat 2,737 mg/kg
Acute oral toxicity
Component: Organic Siloxane Surfactant
LD50 rat > 5,000 mg/kg
Acute oral toxicity
Component: Ethylbenzene
LD50 rat 3,500 mg/kg
Acute oral toxicity
Component: Xylene
LC50 rat 4 h 29.09 mg/l
Acute inhalation
toxicity
Component: Ethyl lactate
LC50 rat >5,400 mg/m3
Acute inhalation
toxicity
Component: n-Butyl acetate
LC50 rat 4 h 760 mg/m3
Acute inhalation
toxicity
Component: Cresol
LC50 rat 8 h 35.38 mg/l
Acute inhalation
toxicity
Component: Ethylbenzene
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LC50 rat 17.375 mg/l
Acute inhalation
toxicity
Component: Xylene
LD50 rabbit >4,300 mg/kg
Acute dermal toxicity
Component: Ethyl lactate
LD50 rat >5,000 mg/kg
Acute dermal toxicity
Component: Cresol
LD50 rabbit > 5,000 mg/kg
Acute dermal toxicity
Component: Organic Siloxane Surfactant
LD50 rat > 2,000 mg/kg
Acute dermal toxicity
Component: Ethylbenzene
LD50 rabbit > 15,000 mg/kg
Acute dermal toxicity
Component: Xylene
rabbit Moderate irritation.
Skin irritation
Component: Ethyl lactate
A single application to rabbit skin produced mild irritation.
Skin irritation
Component: Organic Siloxane Surfactant
A single application to rabbit skin produced mild irritation.
Skin irritation
Component: Xylene
rabbit moderate to severe.
Eye irritation
Component: Ethyl lactate
Single application to the rabbit eye produced conjunctival irritation.
Eye irritation
Component: Organic Siloxane Surfactant
Single application to the rabbit eye produced no signs of ocular
Eye irritation
irritation.
Component: Xylene
Animal studies indicate prolonged inhalation exposures may cause the
Subchronic toxicity
following:
brain damage
Component: Xylene
Toxicity to reproduction
In laboratory studies, birth defects, increased fetal lethality and delayed fetal development have
been observed in offspring of female animals exposed during pregnancy.
Component: Ethyl lactate
Toxicity to reproduction
No adverse reproductive effects were observed in experimental animals.
Component: Cresol
Toxicity to reproduction
Developmental effects were seen in laboratory animals only at dose levels that were maternally
toxic.
Component: Ethylbenzene
IARC assessment: this product is possibly carcinogenic to humans
Subchronic toxicity
(Group 2B).
Component: Ethylbenzene
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Carcinogenicity: This product contains ethylbenzene. A study conducted by the National
Toxicology Program states that lifetime inhalation exposure of rats and mice to high concentrations
of ethylbenzene (750 ppm) resulted in increases in certain types of cancer, including kidney tumors
in rats and lung and liver tumors in mice. Incidences of testicular adenoma were increased along
with increased incidences of thyroid effects in rats at 750 ppm; pituitary effects were observed in
female mice at 250 ppm. These effects were not observed in animals exposed to lower
concentrations of ethylbenzene (75 ppm). The study does not address the relevance of these
results to humans.
Component: Ethylbenzene
Toxicity to reproduction
Inhalation
12. ECOLOGICAL INFORMATION
Ecotoxicological information on this product or its components appear in this section when such data
is available.
Xylene
Ecotoxicity effects
LC50 Rainbow trout (Oncorhynchus mykiss) 96 h
Toxicity to fish
13.5 mg/l
EC50 Daphnia magna
Toxicity to aquatic
150 mg/l
invertebrates
Ethyl lactate
Ecotoxicity effects
EC50 Daphnia magna 48 h
Toxicity to aquatic
683 mg/l
invertebrates
n-Butyl acetate
Ecotoxicity effects
LC50 Bluegill sunfish (Lepomis macrochirus) 96 h
Toxicity to fish
100 mg/l
LC50 Fathead minnow (Pimephales promelas) 96 h
Toxicity to fish
18 mg/l
EC50 Algae (Scenedesmus subspicatus) 72 h
Toxicity to algae
675 mg/l
LC50 Daphnia magna 96 h
Toxicity to aquatic
44 - 205 mg/l
invertebrates
Ethylbenzene
Ecotoxicity effects
LC50 Rainbow trout (Oncorhynchus mykiss) 96 h
Toxicity to fish
4.2 mg/l
EC50 Algae (Selenastrum capricornutum) 72 h
Toxicity to algae
4.6 mg/l
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EC50 Daphnia magna 48 h
Toxicity to aquatic
2.1 mg/l
invertebrates
13. DISPOSAL CONSIDERATIONS
Environmental precautions: Prevent the material from entering drains or water courses.
Do not discharge directly to a water source.
Advise Authorities if spillage has entered watercourse or sewer or has contaminated soil or vegetation.
Disposal
Dispose in accordance with all local, state (provincial), and federal regulations. Incineration is the
recommended method of disposal for containers. Under RCRA, it is the responsibility of the product's
user to determine at the time of disposal, whether the product meets RCRA criteria for hazardous
waste. This is because the product uses, transformations, mixtures, processes, etc. may render the
resulting materials hazardous.
Do not remove label until container is thoroughly cleaned. Empty containers may contain hazardous
residues. This material and its container must be disposed of in a safe way.
14. TRANSPORT INFORMATION
DOT
Not regulated per 49CFR 173.150(f)(2)
IMO/IMDG
RESIN SOLUTION
Proper shipping name
UN 1866
UN-No
3
Class
III
Packing group
Transportation classifications may vary by container volume and may be influenced by regional or
country variations in regulations
15. REGULATORY INFORMATION
SARA TITLE III: Section 311/312 Categorizations (40CFR370): Immediate, delayed,
flammability hazard
SARA TITLE III: Section 313 Information (40CFR372)
This product contains a chemical which is listed in Section 313 at or above de minimis concentrations.
SARA Title III Components: Ethylbenzene 100-41-4
Xylene 1330-20-7
U.S. Toxic Substances Control Act (TSCA) Section 12(b) Export Notification (40 CFR
707, Subpt D):
U.S. Toxic Substances Control Act (TSCA) Section 12(b) Export Notification (40 CFR 707, Subpt D)
This product does not contain any substances subject to Section 12(b) export notification.
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US. Toxic Substances Control Act (TSCA) All components of this product are in compliance
with the inventory listing requirements of the U.S. Toxic Substances Control Act (TSCA) Chemical
Substance Inventory.
California (Proposition 65)
This product contains a component or components known to the state of California to cause cancer:
Components: Ethylbenzene 100-41-4
16. OTHER INFORMATION
Hazard Rating
Health Fire Reactivity
2 2 0
NFPA
Legend
ACGIH American Conference of Governmental Industrial Hygienists
BAc Butyl acetate
OSHA Occupational Safety and Health Administration
PEL Permissible Exposure Limit
STEL Short Term Exposure Limit (STEL):
TLV Threshold Limit Value
TWA Time Weighted Average (TWA):
| Bar denotes a revision from prior MSDS.
The information provided in this Safety Data Sheet is correct to the best of our knowledge, information
and belief at the date of its publication. The information given is designed only as a guidance for safe
handling, use, processing, storage, transportation, disposal and release and is not to be considered a
warranty or quality specification. The information relates only to the specific material designated and
may not be valid for such material used in combination with any other materials or in any process,
unless specified in the text.
Version: 3.1
Print Date: 11/28/2006
Layout 304915
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