1254 Chestnut Street
Newton, MA 02464-1418
Tel: (617) 965-5511
Fax: (617) 965-5818
MATERIAL SAFETY DATA SHEET PAGE 1
26 February 2002
SECTION 1. CHEMICAL IDENTIFICATION ---------------------------------------------------------
CHEMICAL NAME: Organic Polymer Solution
TRADE NAME: NANO 950 PMMA Series Resists in Anisole
Positive Radiation Sensitive Resists
PRODUCT #: See Table 1 ?Section 9
SECTION 2. COMPOSITION-----------------------------------------------------------------------------
HAZARDOUS
INGREDIENTS: Anisole (CAS: 100-66-3); 85-99% (See Table 1 ?Section 9)
OTHER
INGREDIENTS: Poly(methylmethacrylate) (CAS: 9011-14-7)
SECTION 3. HAZARD DATA----------------------------------------------------------------------------
INFLAMMABILITY: Flammable liquid.
SKIN CONTACT: May cause skin irritation.
EYE CONTACT: Vapor or mist is irritating to the eyes.
MUTAGENICITY: Not known to be mutagenic.
CARCINOGENICITY: Anisole - negative in rats (NCI)
TARGET ORGANS: Eyes, Nervous System, Respiratory Tract, Reproductive
SECTION 4. FIRST AID MEASURES-------------------------------------------------------------------
FIRST AID:
INHALATION: If inhaled, remove to fresh air. If patient has stopped breathing,
give artificial respiration. If breathing is difficult give oxygen.
Contact physician immediately.
INGESTION: Wash out mouth with water if conscious. Give two glasses of water
and INDUCE VOMITING. Get medical attention immediately.
SKIN CONTACT: Rinse with water for 15 minutes while removing contaminated
clothing and shoes. Wash affected area with soap and water. Wash
contaminated clothing.
EYE CONTACT: Rinse immediately with water, flush for 15 min. Get emergency
medical assistance.
MATERIAL SAFETY DATA SHEET PAGE 2
26 February 2002
CHEMICAL NAME: Organic Polymer Solution
TRADE NAME: NANO 950PMMA Series Resists in Anisole
Positive Radiation Sensitive Resists
PRODUCT #: See Table 1 ?Section 9
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SECTION 5. FIRE FIGHTING MEASURES-----------------------------------------------------------
EXTINGUISHING
MEDIA: Dry chemical, carbon dioxide, and foam.
SPECIAL FIRE FIGHTING
PRECAUTIONS: Wear self-contained breathing apparatus (SCBA) and
personal protective equipment to prevent contact with skin
and eyes.
UNUSUAL FIRE OR
EXPLOSION HAZARDS: Heat will build pressure and may rupture closed containers.
Keep containers cool with water spray.
SECTION 6. ACCIDENTAL RELEASE PROCEDURES -------------------------------------------
Evacuate area.
Eliminate all ignition sources.
Wear self-contained breathing apparatus (SCBA), rubber boots, and heavy rubber gloves. Avoid
eye or skin contact. Cover with dry absorbent material and collect in closed container for
disposal using non-sparking tools. Ventilate area and wash spill site with ketonic or acetate type
solvent after material pickup is complete, rinse with water. All clean up should be carried out in
accordance with federal, state, and local regulations.
SECTION 7. STORAGE AND HANDLING PRECAUTIONS---------------------------------------
STORAGE: Store in tightly closed container in a cool environment away from
direct sunlight.
HANDLING: Keep away from heat, sparks, and flames.
Hydroscopic.
Do not breathe vapors.
Use only with mechanical exhaust.
Avoid contact with skin, eyes, and clothing.
Avoid prolonged or repeated exposure
Wear heavy rubber gloves.
Wash with soap and water after handling.
Have safety shower and eye wash available.
SECTION 8. EXPOSURE CONTROLS AND PERSONAL PROTECTION-----------------------
RESPIRATORY
PROTECTION: In case of spills, use of self-contained breathing apparatus (SCBA) is
recommended.
VENTILATION: Local or general mechanical ventilation is required.
SKIN PROTECTION: Heavy rubber gloves are highly recommended.
EYE PROTECTION: Safety goggles are highly recommended.
_____________________________________________________________________________________________________
MicroChem Corp. 1254 Chestnut Street種ewton, MA 02464-1418稵el:(617)965-5511稦ax:(617)965-5818
MATERIAL SAFETY DATA SHEET PAGE 3
26 February 2002
CHEMICAL NAME: Organic Polymer Solution
TRADE NAME: NANO 950PMMA Series Resists in Anisole
Positive Radiation Sensitive Resists
PRODUCT #: See Table 1 ?Section 9
-----------------------------------------------------------------------------------------------------------------------------------------
SECTION 9. PHYSICAL AND CHEMICAL DATA--------------------------------------------------
APPEARANCE: Clear to straw colored liquid
ODOR: Aromatic
BOILING POINT: 154 篊 (307 篎)
SPECIFIC GRAVITY: See Table 1 below
VAPOR PRESSURE: 10 mm @ 42 篊 (108 篎)
VAPOR DENSITY: 3.7 (air=1)
H2O SOLUBILITY: 0.2% @ 20 篊, by wt.
% VOLATILES: See Table 1 below
EVAPORATION RATE: 0.1 (BuAc=1)
FLASH POINT: 52 篊 (125 篎) TCC
AUTOIGNITION TEMP: 475 篊 (887 篎)
EXPLOSION LIMITS: unk. lower
unk. upper
Table 1
Name Product # Specific Gravity Volatiles (% by wt.) VOC (g/L)
950A1 M230001 0.994 99 985
950A2 M230002 0.996 98 975
950A3 M230003 0.998 97 970
950A4 M230004 1.000 96 960
950A4.5 M230504 1.001 95.5 958
950A5 M230005 1.004 95 955
950A5.5 M230505 1.004 94.5 950
950A6 M230006 1.005 94 945
950A7 M230007 1.007 93 935
950A8 M230008 1.009 92 930
950A9 M230009 1.010 91 920
950A10 M230010 1.012 90 910
950A11 M230011 1.014 89 900
950A12 M230012 1.016 88 895
950A13 M230013 1.018 87 885
950A15 M230015 1.022 85 870
SECTION 10. REACTIVITY DATA -------------------------------------------------------------------
STABILITY: Stable
INCOMPATIBILITY: Oxidizing Agents, Strong Acids
HAZARDOUS COMBUSTION OR
DECOMPOSITION PRODUCTS: Carbon Monoxide, Carbon Dioxide
_____________________________________________________________________________________________________
MicroChem Corp. 1254 Chestnut Street種ewton, MA 02464-1418稵el:(617)965-5511稦ax:(617)965-5818
MATERIAL SAFETY DATA SHEET PAGE 4
26 February 2002
CHEMICAL NAME: Organic Polymer Solution
TRADE NAME: NANO 950PMMA Series Resists in Anisole
Positive Radiation Sensitive Resists
PRODUCT #: See Table 1 ?Section 9
-----------------------------------------------------------------------------------------------------------------------------------------
SECTION 11. TOXICITY HAZARDS-------------------------------------------------------------------
ACUTE EFFECTS:
May be harmful if swallowed, inhaled, or absorbed through the skin.
Vapor or mist is irritating to the eyes, mucous membranes and upper respiratory tract.
Inhalation of vapors has caused nausea, discomfort and loss of coordination in humans.
Causes skin irritation. Causes moderate skin irritation in rabbits. Low acute dermal toxicity.
No sensitization observed in humans.
The chemical, physical, and toxicological properties have not been thoroughly investigated.
As Anisole
ORAL: LD50 (rat): 3700 mg/Kg
LD50 (rabbit): 2800 mg/Kg
INHALATION: LC50: not listed
TLV: ACGIH (TWA) none established
PEL: OSHA (8hr TWA) none established
SECTION 12. ECOLOGICAL DATA--------------------------------------------------------------------
No data available at this time
SECTION 13. DISPOSAL CONSIDERATIONS-------------------------------------------------------
Burn in an EPA-licensed chemical incinerator equipped with an afterburner and scrubber at an
approved waste disposal facility. Observe all federal, state, and local environmental regulations.
SECTION 14. TRANSPORTATION INFORMATION------------------------------------------------
HAZARD CLASSIFICATION: Flammable Liquid
SHIPPING NAME: Resin Solution
UN NUMBER: UN 1866
PACKING GROUP III
_____________________________________________________________________________________________________
MicroChem Corp. 1254 Chestnut Street種ewton, MA 02464-1418稵el:(617)965-5511稦ax:(617)965-5818
MATERIAL SAFETY DATA SHEET PAGE 5
26 February 2002
CHEMICAL NAME: Organic Polymer Solution
TRADE NAME: NANO 950PMMA Series Resists in Anisole
Positive Radiation Sensitive Resists
PRODUCT #: See Table 1 ?Section 9
-----------------------------------------------------------------------------------------------------------------------------------------
SECTION 15. REGULATORY INFORMATION------------------------------------------------------
HAZARDOUS LISTINGS: All ingredients appear on the TSCA Inventory of
Chemical Substances, EINECS, and the Japan
Hazardous Chemical Listing.
SARA Title III: This product IS NOT subject to SARA Title III, Section
313 Reporting Requirements.
Calif. SCAQMD Rule 443.1 VOC's: See Table 1 ?Section 9
SECTION 16. ADDITIONAL PRECAUTIONS AND COMMENTS-------------------------------
To the best of our knowledge, the above information is believed to be accurate but does
not claim to be all-inclusive and is intended to be used only as a guide. The supplier
makes no warranty of any kind, expressed or implied, concerning the use of this product
and shall not be held liable for any damage resulting from handling or from contact with
the above product. User assumes all risks incident to its use.
_____________________________________________________________________________________________________
MicroChem Corp. 1254 Chestnut Street種ewton, MA 02464-1418稵el:(617)965-5511稦ax:(617)965-5818
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