SH I PLEY
MATERIAL SAFETY DATA SHEET
MEGAPOSIT SPR 3612 PHOTO RESIST
40010 3.00 us us 21.05.1998 MSDS_US
1. CHEMICAL PRODUCT AND COMPANY IDENTIFICATION
40010
Product Code
Trade Name MEGAPOSIT SPR 3612 PHOTO RESIST
Manufacturer/Supplier Shipley Company
Address 455ForestSt.
Marlborough,Massachusetts
01752
Phone Number (508) 481-7950
EmergencyPhone Number (508) 481-7950
Chemtrec# (800) 424-9300
2 July 1996
MSDSfirst issued
21 May1998
MSDSdata revised
PreparedBy: Amy Nichols
C.
Shipley Company, Forest Street, Marlboro, MA01752
455
Local Sales Company
(508-481-7950)
2. COMPOSITION/INFORMATION ON THE INGREDIENTS
Hazardous Components Preparation for US
in
ComponentName Codes Concentration
CresolNovolakResin 20.00 30.00
-
Diazo Photoactive
Compound 1.00 10.00
-
anisole 100-66-3 7.00 12.00
-
cresol 1319-77-3 0.01- 0.99
ethyl
lactate 97-64-3 57,00- 62.00
2-Methyl Acetate
Butyl 624-41-9 l.DO- 5.00
n-amylacetate 628-63-7 1.00-5.00
OrganicSiloxane
Surfactant 0.01-1.00
3. HAZARD IDENTIFICATION
- Irritant - CombustibleSkin - Eye- Nervous
- System
Main Hazards
Inhalation,ingestion,eyeandskin contact,absorption.
Routes Entry
of
Carcinogenic
Status Not consideredcarcinogenic by NTP,IARCand OSHA
Target Organs - Skin - Eye- Nervous
System
HealthEffects- Eyes Liquidor vapor cause
may slight transientirritation.
Materialmay causeslight irritation on prolonged repeated
or
HealthEffects- Skin
contact. Repeated prolonged
or contact may producedefatting of
the skin leading irritation and
to dermatitis.
MSDS_US Page1 of 7
HIPLEY
MATERIAL SAFETY DATA SHEET
MEGAPOSIT SPR 3612 PHOTO RESIST
40010 3.00 US US 21.05.1998 MSDS_US
3. HAZARD IDENTIFICATION
Swallowing havethe following effects:
may
HealthEffects- Ingestion
- irritation of mouth,
throat anddigestivetract - nausea vomiting
- -
diarrhea
Exposure vaporat high concentrations havethe following
to may
HealthEffects- Inhalation
effects:
- irritation of nose,
throat andrespiratory
tract - dizziness
-
drowsiness loss of coordination- headachenausea vomiting
- - -
4. FIRST AID MEASURES
First Aid- Eyes Immediatelyflush the eyewith plenty of waterfor at least 15
minutes,holdingthe eyeopen.Obtain medicalattention if
soreness redness
or persists.
Wash with water.Obtain
skin medical
attention if blistering occurs
First Aid- Skin
or rednesspersists.
First Aid- Ingestion Wash mouth
out with water. Obtainmedicalattention.
Remove exposure. thereis difficulty in breathing,give
from If
First Aid- Inhalation
oxygen.Seek
medicalattention if symptoms
persist.
Adviceto Physicians Treatsyrnptom
atically.
5. FIRE FIGHTING MEASURES
ExtinguishingMedia Usewaterspray, foam,dry chemical carbondioxide. Keep
or
containersandsurroundings with waterspray.
cool
SpecialFire-Fighting This productmaygive rise to hazardous
vapors a fire. Vapors
in
Procedures cantravel a considerabledistance a source ignition andresult
to of
in flashback.
UnusualFire & Explosion Pressure build up in closedcontainers
may with possibleliberation
of combustible
vapors.
Hazards
Wearfull protectiveclothing andself-contained
breathing
ProtectiveEquipment Fire-
for
Fighting apparatus.
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MSDS_US
SHIPLEY
MATERIAL SAFETY DATA SHEET
MEGAPOSITSPR 3612 PHOTORESIST
40010 3.00 US US 21.05.1998 MSDS
US
6. ACCIDENTAL RELEASE MEASURES
Contain absorb
and using earth, sandor other inert material.
Spill Procedures
Transfer into suitablecontainers recovery disposal.Finally
for or
flush areawith plentyof water.
Wearappropriateprotectiveclothing. Wear
respiratoryprotection.
PersonalPrecautions
Eliminate sources ignition.
all of
Environmental
Precautions Prevent materialfromenteringdrains or watercourses.
the
7. HANDLING AND STORAGE
Handling Uselocal exhaust
ventilation. Avoidcontactwith eyes,skin and
clothing. Keep
containertightly closedwhen in use.
not
Store in original containers.Store away fromsources heat or
of
Storage
ignition. Storage areashould be:
- cool- dry - well ventilated out of direct sunlight
-
Other
Noneknown.
8. EXPOSURE CONTROLS/PERSONALPROTECTION
OccupationalExposure
Standards
Noneassigned.
anisole
ACGIH:TLV 5ppm(22mg/m3) 8h TWA.OSHA:PEL5ppm
cresol
(22mg/m3)8h TWA.UK EH40: OES5ppm(22mg/m3)8h
Canbe absorbed
throughskin.
ethyllactate Noneassigned.
Noneassigned.
2-MethylButyl Acetate
ACGIH:TLV 100ppm(532mg/m3) 8h TWA.OSHA:PEL 100ppm
n-amylacetate
(525rag/m3) 8h TWA.
EngineeringControl Measures Engineering methods preventor control exposure preferred.
to are
Methods include processor personnelenclosure,mechanical
ventilation (local exhaust), controlof process
and conditions.
RespiratoryProtection Respiratoryprotectionif thereis a risk of exposure highvapor
to
concentrations.Thespecific respirator selectedmustbe based on
the airborne concentrationfoundin the workplace mustnot
and
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MSDS_US
SHIPLEY
MATERIAL SAFETY DATA SHEET
MEGAPOSIT
SPR 3612 PHOTORESIST
40010 3.00 USUS 21.05.1998 MSDS_US
8. EXPOSURE CONTROLS/PERSONALPROTECTION
exceed working
the limits of the respirator.
Butyl rubbergloves.
HandProtection
Eye Protection Chemical
goggles.
BodyProtection Normalwork wear.
9. PHYSICAL AND CHEMICAL PROPERTIES
Viscous liquid
PhysicalState
Color Red
Odor Mild Ester
VOC (g/I) 799.21
Specific Gravity 1.07
pH Neutral
Boiling Range/Point (癈IF) 150/ 302
43.3-35.6/ 110-114
FlashPoint (PMCC) (癈/F)
Explosion Limits (%) Lower limit ~2%
Solubility in Water Insoluble.
Vapor Density(Air = 1) Heavier thanair.
EvaporationRate Slowerthan ether
Vapor Pressure Ethyl Lactate: 2.0 mmHg 20 癈.
at
Anisole: 9.7 mmHg 42 癈.
at
AmylAcetate (mix): 4.00 mmHg 20 癈.
at
10. STABILITY AND REACTIVITY
Stability Stableundernormal
conditions.
- Hightemperatures Static discharge
-
Conditions Avoid
to
Incompatibilities - Oxidizingagents- Bases Acids
-
Hazardous
Polymerization Will not occur.
HazardousDecomposition - carbon monoxide Carbon
- Dioxide- oxidesof nitrogen- oxides
Products of sulfur
MSDS_US Page4 of 7
SHIPLEY
MATERIAL SAFETY DATA SHEET
MEGAPOSIT SPR 3612 PHOTO RESIST
40010 3.00 us US 21.05.1998 MSDS
US
11. TOXICOLOGICAL INFORMATION
ethyl lactate: Oral LD50(mouse)2500mg/kg.
Acute Data
Anisole: Oral LD50(rat) 3700mg/kg.
n-AmylAcetate: Oral LD50 (rat) 16600mg/kg.
Chronic/Subchronic
Data Nodata.
Noadverse
effects are expected.
Genotoxicity
Reproductive/Developmental Noadverse reproductive fetal developmental
or effects are
Toxicity expected.
Additional Data Noneknown.
12. ECOLOGICAL INFORMATION
Mobility Norelevantstudiesidentified.
Persistence/Deg
radability Ethyl Lactate: COD 0.00166gig.
=
Bio-accumulation Productis not expected bioaccumulate.
to
Ecotoxicity Ethyl Lactate: Testson the following speciesgavea 48hEC50
of
683mg/litre:
- daphnia
13. DISPOSAL CONSIDERATIONS
Product Disposal Incineration is the recommended of disposal. Dispose in
method of
accordance all applicable
with local andnational regulations.
Labelsshouldnot be removed containersuntil they have
from
ContainerDisposal
beencleaned. Emptycontainers maycontain hazardous
residues.
Dispose containers
of with care.
14. TRANSPORT INFORMATION
Not Regulated 49 CFR
per 173.150(f)(2)
DOTGround:
UNProper Shipping Name Flammable
liquid, n.o.s.
UNClass (3) FlammableLiquid
UN Number UN1993
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MSDS_US
SH I PLEY
MATERIAL SAFETY DATA SHEET
MEGAPOSIT
SPR 3612 PHOTORESIST
40010 3.00 US US21.05.1998 MSDS
US
14. TRANSPORT INFORMATION
UNPackaging Group III
ethyl lactate
N.O.S.1:
Anisole
N.O.S.2:
SubsidiaryRisks None.
CLASS - 31(c)
3
ADRJRID Substance
Identification Number
CERCLA RQ Cresol(100#)
MarinePollutant No.
15. REGULATORY INFORMATION
All components this productare listed on the U.S. Toxic
of
TSCAListed
Substances
Control Act Chemical Inventory (TSCA Inventory)
are exemptedfrom listing because LowVolume
a Exemption has
beengranted in accordancewith 40 CFR 723.50.
TSCAExemptions
WHMIS
Classification D.2.B B.3
All components beenchecked inclusion on the
have for
MARight To KnowLaw
Massachusetts SubstanceList (MSL). Those components
presentat the de minimus
concentration havebeenidentified in
the hazardousingredientssection of the MSDS.
California Proposition65 This productdoesnot containmaterialswhichthe Stateof
California hasfoundto cause
cancer,birth defectsor other
reproductiveharm.
SARA TITLEIll-Section Immediate,
delayed,flammability hazard
311/312Categorization (40
CFR370)
This product
doesnot containa chemical
whichis listed in Section
SARATITLEIll-Section 313 (40
313at or above minimisconcentrations.
de
CFR372)
16, OTHER INFORMATION
NFPARating- FIRE 2
NFPARating- HEALTH 2
NFPARating- REACTIVITY 0
NFPARating- SPECIAL None.
Composition/Information the Components
on
RevisionsHighlighted
OccupationalExposure Standards
Flash Point (PMCC)
(癈/F)
MSDS_US Page6 of 7
SHI PLEY
MATERIAL SAFETY DATA SHEET
MEGAPOSIT
SPR 3612 PHOTORESIST
40010 3.00 US US 21.05.1998 MSDS_US
16. OTHER INFORMATION
Abbreviations CAS#:Chemical Abstract Services Number
ACGIH:AmericanConferenceof Governmental Industrial
Hygienists
OSHA: Occupational Safety and HealthAdministration
TLV: ThresholdLimit Value
PEL: PermissibleExposure Limit
STEL: Short TermExposure Limit
NTP: National ToxicologyProgram
IARC: International Agency Research Cancer
for on
R: Risk
S: Safety
LD50: Lethal Dose50%
LC50: Lethal Concentration 50%
BOD: Biological Oxygen Demand
Koc: Soil Organic
CarbonPartition Coefficient.
TLm: Median ToleranceLimit
Disclaimer
Thedata containedherein is basedon information that Shipley Company believes to be reliable, but
no expressed impliedwarrantyis made regardto the accuracy suchdata or its suitability for
or with of
a given situation. Suchdata relates only to the specific productdescribed not to suchproductsin
and
combination with any other productand no agent of ShipleyCompany authorizedto vary anyof such
is
data. ShipteyCompany its agentsdisclaimall liability for anyaction takenor foregone reliance
and on
uponsuch data.
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