MATERIAL SAFETY DATA SHEET
MICROPOSIT S1813 PHOTO RESIST
41280 4.00 US US 11.06.1998 MSDS_US
1. CHEMICAL PRODUCT AND COMPANY IDENTIFICATION
41280
Product Code
MICROPOSIT S1813 PHOTO RESIST
Trade Name
Shipley Company
Manufacturer/Supplier
455 Forest St.
Address
Marlborough, Massachusetts 01752
(508) 481-7950
Phone Number
(508) 481-7950
Emergency Phone Number
(800) 424-9300
Chemtrec #
2 July 1996
MSDS first issued
11 June 1998
MSDS data revised
Amy C. Nichols
Prepared By:
Shipley Company, 455 Forest Street, Marlboro, MA 01752
Local Sales Company
(508-481-7950)
2. COMPOSITION/INFORMATION ON THE INGREDIENTS
Components in Product
Component Name CAS# / Codes Concentration
Electronic grade propylene glycol monomethyl 108-65-6 71.00 - 76.00
ether acetate
Mixed cresol novolak resin 10.00 - 20.00
Fluoroaliphatic Polymer Esters 0.01 - 1.00
Diazo Photoactive Compound 1.00 - 10.00
cresol 1319-77-3 0.01 - 0.99
3. HAZARD IDENTIFICATION
- Irritant - Combustible - Nervous System - Skin - Eye - Kidney -
Main Hazards
Liver
Inhalation, ingestion, eye and skin contact, absorption.
Routes of Entry
Not considered carcinogenic by NTP, IARC and OSHA
Carcinogenic Status
- Nervous System - Skin - Eye - Liver - Kidney
Target Organs
Liquid or vapor may cause pain, transient irritation and superficial
Health Effects - Eyes
corneal effects.
Material may cause slight irritation on prolonged or repeated
Health Effects - Skin
contact. Repeated and/or prolonged contact may lead to: -
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MSDS_US
MATERIAL SAFETY DATA SHEET
MICROPOSIT S1813 PHOTO RESIST
41280 4.00 US US 11.06.1998 MSDS_US
3. HAZARD IDENTIFICATION
drowsiness - liver damage - kidney damage
A large dose may have the following effects:
Health Effects - Ingestion
- drowsiness - liver damage - kidney damage
Exposure to vapor at high concentrations may have the following
Health Effects - Inhalation
effects:
- irritation of nose, throat and respiratory tract - liver damage -
kidney damage
4. FIRST AID MEASURES
Immediately flush the eye with plenty of water for at least 15
First Aid - Eyes
minutes, holding the eye open. Obtain medical attention if
soreness or redness persists.
Wash skin with water. Obtain medical attention if blistering occurs
First Aid - Skin
or redness persists.
Wash out mouth with water. Obtain medical attention.
First Aid - Ingestion
Remove from exposure. If there is difficulty in breathing, give
First Aid - Inhalation
oxygen. Seek medical attention if symptoms persist.
Treat symptomatically.
Advice to Physicians
5. FIRE FIGHTING MEASURES
Use water spray, foam, dry chemical or carbon dioxide. Keep
Extinguishing Media
containers and surroundings cool with water spray.
This product may give rise to hazardous vapors in a fire. Vapors
Special Fire-Fighting
can travel a considerable distance to a source of ignition and
Procedures
result in flashback.
Pressure may build up in closed containers with possible liberation
Unusual Fire & Explosion
of combustible vapors.
Hazards
Wear full protective clothing and self-contained breathing
Protective Equipment for Fire-
apparatus.
Fighting
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MSDS_US
MATERIAL SAFETY DATA SHEET
MICROPOSIT S1813 PHOTO RESIST
41280 4.00 US US 11.06.1998 MSDS_US
6. ACCIDENTAL RELEASE MEASURES
Contain and absorb using earth, sand or other inert material.
Spill Procedures
Transfer into suitable containers for recovery or disposal. Finally
flush area with plenty of water.
Wear appropriate protective clothing. Wear respiratory protection.
Personal Precautions
Eliminate all sources of ignition.
Prevent the material from entering drains or water courses.
Environmental Precautions
7. HANDLING AND STORAGE
Use local exhaust ventilation. Avoid contact with eyes, skin and
Handling
clothing. Keep container tightly closed when not in use.
Store in original containers. Store away from sources of heat or
Storage
ignition. Storage area should be:
- cool - dry - well ventilated - out of direct sunlight
Other
Proprietary photoresist film contains approximately 2-4% of 2,3,4-trihydroxybenzophenone(THBP),
which may sublime during soft-bake or hard-bake processing. THBP has low acute toxicity
(LD50>5g/kg). Contact with eyes, skin or mucous membranes cause irritation.
To prevent accumulation of THBP on equipment surfaces and ventilation ducts, preventative
maintenance program including regular cleaning should be implemented. Wipe surfaces using an
appropriate cleaning solvent when possible. Provide adequate general or local exhaust ventilation
during the cleaning process. In situations where this is not possible or where solvent or dust
concentrations become excessive, use an air purifying respirator with an organic vapor/toxic
particulate cartridge. When cleaning residual THBP, wear protective gloves and adequate protective
clothing to prevent skin contact. Practice good personal hygiene to prevent accidental exposure.
Clean all protective clothing and equipment thoroughly after each use.
8. EXPOSURE CONTROLS/PERSONAL PROTECTION
Occupational Exposure Standards
Manufacturer recommends 30ppm 8h TWA and 90ppm 15 min
Electronic grade propylene
STEL.
glycol monomethyl ether
acetate
ACGIH: TLV 5ppm (22mg/m3) 8h TWA. OSHA: PEL 5ppm
cresol
(22mg/m3) 8h TWA. UK EH40: OES 5ppm (22mg/m3) 8h TWA.
Can be absorbed through skin.
Engineering methods to prevent or control exposure are preferred.
Engineering Control Measures
Methods include process or personnel enclosure, mechanical
ventilation (local exhaust), and control of process conditions.
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MSDS_US
MATERIAL SAFETY DATA SHEET
MICROPOSIT S1813 PHOTO RESIST
41280 4.00 US US 11.06.1998 MSDS_US
8. EXPOSURE CONTROLS/PERSONAL PROTECTION
Respiratory protection if there is a risk of exposure to high vapor
Respiratory Protection
concentrations. The specific respirator selected must be based on
the airborne concentration found in the workplace and must not
exceed the working limits of the respirator.
Butyl rubber gloves.
Hand Protection
Chemical goggles.
Eye Protection
Normal work wear.
Body Protection
9. PHYSICAL AND CHEMICAL PROPERTIES
Viscous liquid
Physical State
Red
Color
Sweet
Odor
764.7
VOC (g/l)
1.04
Specific Gravity
Neutral
pH
145.8/295
Boiling Range/Point (癈/F)
40.5-46.1 / 105-115
Flash Point (PMCC) (癈/F)
Lower limit 1.5 at 20 癈. Upper limit 7.0 at 20 C..
Explosion Limits (%)
Insoluble.
Solubility in Water
Heavier than air.
Vapor Density (Air = 1)
Slower than ether
Evaporation Rate
Propylene Glycol Monomethyl Ether Acetate: 3.7 mmHg at 20
Vapor Pressure
癈.
10. STABILITY AND REACTIVITY
Stable under normal conditions.
Stability
- High temperatures - Static discharge
Conditions to Avoid
- Oxidizing agents
Incompatibilities
Will not occur.
Hazardous Polymerization
- oxides of carbon - oxides of nitrogen - acrid smoke and irritating
Hazardous Decomposition
fumes - phenols - carbon monoxide - toxic fluorine compounds
Products
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MATERIAL SAFETY DATA SHEET
MICROPOSIT S1813 PHOTO RESIST
41280 4.00 US US 11.06.1998 MSDS_US
10. STABILITY AND REACTIVITY
11. TOXICOLOGICAL INFORMATION
Propylene Glycol Monomethyl Ether Acetate: Oral LD50 (rat)
Acute Data
8532mg/kg. Dermal LD50 (rabbit) 5000mg/kg.
No data.
Chronic/Subchronic Data
It was not mutagenic when tested in bacterial or mammalian
Genotoxicity
systems.
Developmental effects were seen in laboratory animals only at
Reproductive/Developmental
dose levels that were maternally toxic.
Toxicity
None known.
Additional Data
12. ECOLOGICAL INFORMATION
Propylene Glycol Monomethyl Ether Acetate: Koc is 0 - 50.
Mobility
The product is partially or slowly biodegradable. BOD20 greater
Persistence/Degradability
than 40%
No data.
Bio-accumulation
The product is rated as practically non-toxic to aquatic species.
Ecotoxicity
Tests on the following species gave a LC50 of 161mg/litre: -
fathead minnows
Tests on the following species gave a LC50 of 408mg/litre: -
daphnia
13. DISPOSAL CONSIDERATIONS
Incineration is the recommended method of disposal. Dispose of
Product Disposal
in accordance with all applicable local and national regulations.
Labels should not be removed from containers until they have
Container Disposal
been cleaned. Empty containers may contain hazardous residues.
Dispose of containers with care.
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MSDS_US
MATERIAL SAFETY DATA SHEET
MICROPOSIT S1813 PHOTO RESIST
41280 4.00 US US 11.06.1998 MSDS_US
14. TRANSPORT INFORMATION
Not Regulated per 49 CFR 173.150(f)(2)
DOT Ground:
Flammable liquid, n.o.s.
UN Proper Shipping Name
(3) Flammable Liquid
UN Class
UN1993
UN Number
III
UN Packaging Group
Propylene Glycol Monomethyl Ether Acetate
N.O.S. 1:
N.O.S. 2:
None.
Subsidiary Risks
CLASS 3 - 31(c)
ADR/RID Substance
Identification Number
Cresol (100#)
CERCLA RQ
No.
Marine Pollutant
15. REGULATORY INFORMATION
Yes
TSCA Listed
TSCA Exemptions
D.2.B B.3
WHMIS Classification
All components have been checked for inclusion on the
MA Right To Know Law
Massachusetts Substance List (MSL). Those components
present at the de minimus concentration have been identified in
the hazardous ingredients section of the MSDS.
This product does not contain materials which the State of
California Proposition 65
California has found to cause cancer, birth defects or other
reproductive harm.
Immediate, delayed, flammability hazard
SARA TITLE III-Section
311/312 Categorization (40
CFR 370)
This product does not contain a chemical which is listed in Section
SARA TITLE III-Section 313 (40
313 at or above de minimis concentrations.
CFR 372)
16. OTHER INFORMATION
2
NFPA Rating- FIRE
2
NFPA Rating- HEALTH
0
NFPA Rating- REACTIVITY
None.
NFPA Rating- SPECIAL
Flash Point (PMCC) (癈/F)
Revisions Highlighted
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MATERIAL SAFETY DATA SHEET
MICROPOSIT S1813 PHOTO RESIST
41280 4.00 US US 11.06.1998 MSDS_US
16. OTHER INFORMATION
CAS#: Chemical Abstract Services Number
Abbreviations
ACGIH: American Conference of Governmental Industrial
Hygienists
OSHA: Occupational Safety and Health Administration
TLV: Threshold Limit Value
PEL: Permissible Exposure Limit
STEL: Short Term Exposure Limit
NTP: National Toxicology Program
IARC: International Agency for Research on Cancer
R: Risk
S: Safety
LD50: Lethal Dose 50%
LC50: Lethal Concentration 50%
BOD: Biological Oxygen Demand
Koc: Soil Organic Carbon Partition Coefficient.
TLm: Median Tolerance Limit
Disclaimer
The data contained herein is based on information that Shipley Company believes to be reliable, but
no expressed or implied warranty is made with regard to the accuracy of such data or its suitability for
a given situation. Such data relates only to the specific product described and not to such products in
combination with any other product and no agent of Shipley Company is authorized to vary any of
such data. Shipley Company and its agents disclaim all liability for any action taken or foregone on
reliance upon such data.
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