Rohm and Haas Electronic Materials, LLC
SPR HI410
Hynix Semiconductor Product Code:
SECTION 1 : CHEMICAL PRODUCT AND COMPANY IDENTIFICATION
MSDS Name: SPR HI410
Manufacturer Name: Rohm and Haas Electronic Materials, LLC
Chemtrec: For emergencies in the US, call CHEMTREC: 800-424-9300
Manufacturer MSDS Revision Date: 03/08/2005
Version: 1.0
Distributor Name: Rohm and Haas Electronic Materials, LLC
Distributor Address:
455 Forest Street
Marlborough, MA 01752
United States of America
For non-emergency information contact: 508-481-7950
Emergency telephone number:
Rohm and Haas Emergency: 215-592-3000
NFPA
Health: 1
Flammability: 2
Reactivity: 0
Other:
Product Codes:
SECTION 2 : COMPOSITION, INFORMATION ON INGREDIENTS
Chemical Name CAS# Percent
Methyl-3-methoxypropionate 3852-09-3 Concentration: 60.0 -
80.0%
Chemical Name Percent
Resin Concentration: 20.0 -
40.0%
Chemical Name Percent
Photoactive Compound Concentration: < 2.0%
Chemical Name Percent
Surfactant Concentration: < 0.1%
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SECTION 3 : HAZARDS IDENTIFICATION
Emergency Overview:
Hazard Summary:
CAUTION!
Combustible liquid and vapor. Causes irritation to eyes, nose, and respiratory tract.
Prolonged, repeated contact, inhalation, ingestion, or absorption through the skin, may cause toxic effects to internal
organ systems.
Physical State:
Form: Liquid
Color: Dark red
Odor: Sweet odor
Applies to All Ingredients:
Route of Exposure:
Inhalation, ingestion, eye and skin contact, absorption.
Potential Health Effects:
Eye Contact:
May cause pain, transient irritation and superficial corneal effects.
Skin Contact:
Material may cause irritation.
Prolonged or repeated exposure may have the following effects:
Central nervous system depression
Drowsiness
Defatting of skin leading to irritation and dermatitis
Kidney damage
Inhalation:
Inhalation may have the following effects:
Irritation of nose, throat and respiratory tract
Higher concentrations may have the following effects:
Systemic effects similar to those resulting from ingestion
Ingestion:
Swallowing may have the following effects:
Irritation of mouth, throat and digestive tract
Headache
Nausea
Vomiting
Repeated doses may have the following effects:
Central nervous system depression
Kidney damage
Carcinogenicity:
Not considered carcinogenic by NTP, IARC, and OSHA
Target Organs:
Eye
Skin
Respiratory System
Nervous system
Kidney
SECTION 4 : FIRST AID MEASURES
Eye Contact:
Immediately flush the eye with plenty of water for at least 15 minutes, holding the eye open. Obtain medical attention if
soreness or redness persists.
Skin Contact:
Wash skin with water. Continue washing for at least 15 minutes. Obtain medical attention if blistering occurs or redness
persists.
Inhalation:
Remove from exposure. If there is difficulty in breathing, give oxygen. Seek medical attention if symptoms persist.
Ingestion:
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Wash out mouth with water. Have victim drink 1-3 glasses of water to dilute stomach contents. Induce vomiting if
person is conscious. Immediate medical attention is required. Never administer anything by mouth if a victim is losing
consciousness, is unconscious or is convulsing.
Note to Physicians:
Treat symptomatically.
SECTION 5 : FIRE FIGHTING MEASURES
Flash Point:
47 deg C (117 deg F)
Extinguishing Media:
Suitable: Use water spray, foam, dry chemical or carbon dioxide. Keep containers and surroundings cool with water
spray.
Fire Fighting Instructions:
Specific hazards during fire fighting: This product may give rise to hazardous vapors in a fire. Vapors can travel a
considerable distance to a source of ignition and result in flashback.
Protective Equipment:
For fire-fighters: Wear full protective clothing and self-contained breathing apparatus.
Further information:
Pressure may build up in closed containers with possible liberation of combustible vapors.
SECTION 6 : ACCIDENTAL RELEASE MEASURES
Personal Precautions:
Wear suitable protective clothing.
Wear respiratory protection.
Eliminate all ignition sources.
Spill Cleanup Measures:
Contain spills immediately with inert materials (e.g., sand, earth).
Transfer into suitable containers for recovery or disposal.
Finally flush area with plenty of water.
Environmental Precautions:
Prevent the material from entering drains or water courses.
Do not discharge directly to a water source.
Advise Authorities if spillage has entered watercourse or sewer or has contaminated soil or vegetation.
SECTION 7 : HANDLING and STORAGE
Handling:
Use local exhaust ventilation. Avoid contact with eyes, skin and clothing. Keep container tightly closed.
Further information on storage conditions: Keep away from heat, sparks, flame, and other sources of ignition.
Practice good personal hygiene to prevent accidental exposure.
Storage:
Storage conditions: Store in original container. Keep away from heat and sources of ignition.
Storage area should be: cool dry well ventilated out of direct sunlight
SECTION 8 : EXPOSURE CONTROLS, PERSONAL PROTECTION
Engineering Controls:
Engineering methods to prevent or control exposure are preferred. Methods include process or personnel enclosure,
mechanical ventilation (local exhaust), and control of process conditions.
Skin Protection Description:
Normal work wear.
Hand Protection Description:
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Butyl rubber gloves. Other chemical resistant gloves may be recommended by your safety professional.
Eye/Face Protection:
Goggles
Protective Clothing/Body Protection:
Normal work wear.
Respiratory Protection:
Respiratory protection if there is a risk of exposure to high vapor concentrations. The specific respirator selected must
be based on the airborne concentration found in the workplace and must not exceed the working limits of the
respirator.
Exposure Limits:
Exposure limits are listed below, if they exist.
Ingredient Guidelines
Ingredient: Methyl-3-methoxypropionate
Guideline Type: Manufacturer Exposure Limit
Guideline Information: TWA: 2 ppm; STEL: 6 ppm
SECTION 9 : PHYSICAL AND CHEMICAL PROPERTIES
Physical State/Appearance:
Form: Liquid
Color:
Dark red
Odor:
Sweet odor
pH:
Neutral
Vapor Pressure:
0.239 kPa at 20 deg C (68 deg F)
Vapor Density:
Relative: Heavier than air.
Boiling Point:
> 140 deg C (284 deg F)
Solubility:
Water: Insoluble
Density:
Relative: 1.06
Evaporation Point:
Slower than ether
Volatile Organic Compound Content:
785 g/l
Flashpoint:
47 deg C (117 deg F)
NOTE: The physical data presented above are typical values and should not be construed as a specification.
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SECTION 10 : STABILITY AND REACTIVITY
Conditions to Avoid:
High temperatures. Static discharge. Exposure to sunlight.
Incompatibilities with Other Materials:
Materials to avoid: Amines Strong acids strong bases Strong oxidizers
Reactivity:
Hazardous reactions: Stable under normal conditions.
Hazardous Polymerization:
Will not occur.
Hazardous Decomposition Products:
Oxides of carbon, oxides of fluorine, nitrogen oxides (NOx).
SECTION 11 : TOXICOLOGICAL INFORMATION
Methyl-3-methoxypropionate:
Skin Effects:
Acute dermal toxicity: LD50 guinea pig 20 mg/kg
Ingestion Effects:
Acute oral toxicity: LD50 rat female 1,768 - 3,700 mg/kg
Acute oral toxicity: LD50 rat male 2,973 - 4,900 mg/kg
Inhalation Effects:
Acute inhalation toxicity: LC50 rat 6 h 13.4 mg/l
Subchronic Effects:
Inhalation rat
Dose: 1000 ppm 28-day central nervous system depression irritation of nose, throat and respiratory tract
Inhalation rat
28-day NOEL: 1.45 mg/l central nervous system depression irritation of nose, throat and respiratory tract
Mutagenicity:
Tests on bacterial or mammalian cell cultures did not show mutagenic effects.
Teratogenicity:
No significant adverse effects were observed in rat dams or fetuses following inhalation of < = 50 ppm during days
6-15 of gestation.
Reproductive Toxicity:
When maternal toxicity occurred slight fetotoxicity but no teratogenicity was also observed in these animals.
Irritation:
Skin irritation: A single application to rabbit skin produced mild irritation.
Eye irritation: Single application to the rabbit eye produced moderate to severe irritation.
Photoactive Compound:
Ingestion Effects:
Acute oral toxicity: LD50 rat 600 mg/kg
Toxicological Paragraph:
Toxicological information on this product or its components appear in this section when such data is available.
SECTION 12 : ECOLOGICAL INFORMATION
Ecological Paragraph:
Ecotoxicological information on this product or its components appear in this section when such data is available.
Effect of Material On Aquatic Life:
Methyl-3-methoxypropionate:
Ecotoxicity effects:
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Toxicity to fish: LC50 Fathead minnow (Pimephales promelas) 96 h 264 mg/l
Toxicity to aquatic invertebrates:
EC50 ceriodaphnia dubia (water flea) 48 h > 951 mg/l
SECTION 13 : DISPOSAL CONSIDERATIONS
Waste Disposal:
Dispose in accordance with all local, state (provincial), and federal regulations. Incineration is the recommended
method of disposal for containers. Under RCRA, it is the responsibility of the product's user to determine at the time
of disposal, whether the product meets RCRA criteria for hazardous waste. This is because the product uses,
transformations, mixtures, processes, etc. may render the resulting materials hazardous.
Do not remove label until container is thoroughly cleaned. Empty containers may contain hazardous residues. This
material and its container must be disposed of in a safe way.
Environmental precautions:
Prevent the material from entering drains or water courses. Do not discharge directly to a water source.
Advise Authorities if spillage has entered watercourse or sewer or has contaminated soil or vegetation.
SECTION 14 : TRANSPORT INFORMATION
Transportation Information:
Transportation classifications may vary by container volume and may be influenced by regional or country variations
in regulations
DOT Shipping Name:
Resin solution
DOT UN Number:
UN 1866
DOT Hazard Class: 3
DOT Packing Group: III
IMO Shipping Name:
RESIN SOLUTION
IMO Hazard Class:
3
IMO UN Number: UN 1866
IMO Packing Group: III
Maritime Transportation CGVS/GGVE/IMDG: Proper shipping name: RESIN SOLUTION
CGVS/GGVE/IMDG UN or NA Identification Number: UN 1866
CGVS/GGVE/IMDG Class: 3
CGVS/GGVE/IMDG Packaging Group: III
SECTION 15 : REGULATORY INFORMATION
Applies to all ingredients:
TSCA 8(b): Inventory Status
All components of this product are in compliance with the inventory listing requirements of the U.S. Toxic Substances
Control Act (TSCA) Chemical Substance Inventory.
TSCA 12(b): Export Notification
U.S. Toxic Substances Control Act (TSCA) Section 12(b) Export Notification (40 CFR 707, Subpt D):
This product does not contain any substances subject to Section 12(b) export notification.
Section 312 Hazard Category:
Section 311/312 Categorizations (40CFR370):
Acute: Yes
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Chronic: Yes
Fire: Yes
Section 313 Toxic Release Form:
(40CFR372): This product does not contain a chemical which is listed in Section 313 at or above de minimis
concentrations.
State:
California (Proposition 65): This product does not contain materials which the State of California has found to cause
cancer, birth defects or other reproductive harm.
SECTION 16 : ADDITIONAL INFORMATION
NFPA:
Fire Hazard: 2
Health: 1
Reactivity: 0
MSDS Revision Date:
03/08/2005
Version: 1.0
Disclaimer:
The information provided in this Safety Data Sheet is correct to the best of our knowledge, information and belief at
the date of its publication. The information given is designed only as a guidance for safe handling, use, processing,
storage, transportation, disposal and release and is not to be considered a warranty or quality specification. The
information relates only to the specific material designated and may not be valid for such material used in
combination with any other materials or in any process, unless specified in the text.
Legend:
ACGIH: American Conference of Governmental Industrial Hygienists
BAc: Butyl acetate
OSHA: Occupational Safety and Health Administration
PEL: Permissible Exposure Limit
STEL: Short Term Exposure Limit (STEL)
TLV: Threshold Limit Value
TWA: Time Weighted Average (TWA)
|: Bar denotes a revision from prior MSDS.
Layout 386187
Copyright?1996-2003 Actio Software Corporation. All Rights Reserved.
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