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JSRPFRIX560FDM2
MATERIALSAFETYDATASHEET
PRODUCT NAME: JSR PFR IX560FDM2
CHEMICAL PRODUCTAND COMPANYIDENTIFICATION
1
Manufacturer:
J SRMicroelectronics
Inc. 1280North Mathilda Avenue Sunnyvale, CA94089
Emergency Phone: Fax Number:.
408-543-8800 408-543-8979
24-HourEmergency Phone#1: 24-HourEmergency
Contact#1:
Pager: 1-800-759-7243 NobuKoshiba
PIN: 5222505
24-HourEmergency Phone#2: 24-HourEmergencyContact#2:
1-800-424-9300 Chemtrec
Effective Date: 5/28/98 MSDS# FDM2
COMPOSITION/INFORMATION ON INGREDIENTS
1
(% CHEMICALCOMPONENTS WT.)
BY
%
Component CAS#
Phenolic resin Proprietary 10-20%
Bisphenol derivitive Proprietary 3-10%
Naphthoquinonediazide(NQD)ester Proprietary 5-10%
Methyl 3-methoxypropionate
(MMP) 3852-09-3 20-30%
Ethyl lactate 97-64-3 45-60%
(SeeSection8 for exposure
guidelines)
HAZARDS
IDENTIFICATION
=
EMERGENCY OVERVIEW
Clear,yellowish red viscous
- liquid.
Combustible.
Cancause andskin irritation.
eye
Combustion produce
will toxic vaporsandgases.
Sweetester-like odor.
POTENTIALHEALTHEFFECTS
EYE: contact causes
Eye severeirritation.
SKIN:
Prolonged repeated
and contactwith skin may
cause
irritation anddermatitis.
INGESTION:
Swallowingmaynauseateand causepain in esophagus stomach.
and
INHALATION:Inhalation of concentrated
vaporsmay
causerespiratory irritation and
anesthesia.
SIGNS SYMPTOMS: and skin irritation,
AND Eye nausea,pain in esophagus
and
stomach, anesthesia.
and
JSRPFRIX560FDM2 Page of 6
2
CHRONIC
EFFECTS/CARCINOGENICITY:
Not knownto be carcinogenic.
CHRONIC:Bisphenolcompound causesystemiceffects; (a) depressionin body
may
weight
gain; and(b) bloodeffects.
FOR COMPLETEDISCUSSIONOF THE TOXICOLOGY
DATA FROMWHICH
THIS EVALUATION
WASMADE PLEASEREFER SECTION
TO 11.
FIRST AID MEASURES
EYES:
Immediately
flush eyeswith plenty of waterat least for 15 minutes.
Call physician
immediately.
SKIN:Immediately skin with plenty of water.Call physician
wash immediately irritation
if
develops.
INHALATION: exposed
Remove person fresh air, perform
to artificial respiration if
necessary.
Call physicianimmediately.
INGESTION: large quantities of waterandinducevomiting; contact a poisoncenter
Give
and haveMSDSinformation available.
NOTE PHYSICIAN:
TO Treatment vary with condition of victim and specifics of
may
incident.
FIRE FIGHTING MEASURES
=
FLAMMABLE
LIMITSLFL & UFL: Not available.
SOLVENT(MMP) LFL: 1.9% UFL: 13.1%
SOLVENT(EL) LFL: 1.5% UFL: 11.4%
FLASHPOINT AND METHOD: 49癈
EXTINGUISHING Carbondioxide, alcohol foamor dry chemicals.
MEDIA:
FIREAND EXPLOSION HAZARDS: Combustibleliquid. Toxic gases, smoke, and
oxidesof carbonwill form uponcombustion.
FIRE-FIGHTING EQUIPMENT: should be used to keep fire exposed
Water containers
cool andto dispense
vapors.Firefighters shouldwearself-containedbreathing
apparatus.
ACCIDENTAL RELEASE MEASURES
J
LARGE SPILL:
For indoorspills, provideincreasedventilation as required minimize
to exposure.
Contain,absorb, cleanup spill as indicatedin the appropriate
and the land or water
section below.Dispose absorbent other wastein an appropriatechemical
of and
wastecontainer. Wear properpersonalprotective equipment.
SMALL SPILL:
Same above.
as
LAND:
Dikeor absorb with inert absorbent
materialsuchas sandor saw-dust transfer to
and
container disposal.
for
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JSRPFRIX560FDM2
WATER:
Remove surfaceby skimming with suitable absorbents.
from or
HANDLING AND STORAGE
=
WARNING:
Combustible
solvent mixture. Avoidheat, sunlight, and ignition sources.
PRECAUTIONS: in original containerin a dry area. Open
Store only undersafe light and
well ventilated conditions.Loosenclosurecautiouslybeforeopening.When usingthis
substance: avoidbreathing substance; avoidingestion; (c) userespiratory
(a) the (b)
protectionwhen dust or mist form. Wear
in chemical goggles,chemicalresistant gloves
andprotectiveclothing to preventcontact. Wash thoroughly
after handling.
RECOMMENDED
STORAGE
TEMPERATURE:
Between 50 and 70癋 (Between 10-
21癈).
RECOMMENDED
STORAGE
PRESSURE:
Atmospheric.
EXPOSURE CONTROLS/PERSONAL PROTECTION
=
RESPIRATORY
PROTECTION: use of an air supplied respirator is recommended.
The
SKINPROTECTION: impermeable
Wear gloves and clothing during activities where
thereis potentialfor direct skin contactwith chemical.
EYEPROTECTION: chemical goggles.
Wear
EXPOSURE
GUIDELINE(S):
OSHA HAZARDS CFR1910.1200Exposure Limits 8
(29 hrs. TWA (ppm)
COMPONENT OSHAPEL ACGiH TLV Supplier
I not established
Phenoiicresin not established
not established not established
Bisphe.nol
derivitive
NQD ester not established not established
MMP not established not established 2ppm
EL not established not established
ENGINEERING CONTROLS: use of exhaust ventilation is recommended control
The to
emissionsnear the source. Laboratorysamples shouldbe handledin a fumehood.
Provide mechanicalventilation of confinedspaces.Useappropriateexplosionproof
ventilation andotherelectrical equipment.
PHYSICAL AND CHEMICAL PROPERTIES
1
APPEARANCE:Clear,yellowish redviscous
- liquid.
ODOR:Sweet ester - like odor.
VAPOR PRESSURE: 2.7 mmHg VAPOR DENSITY: 4 (Air=l)
ca.
SPECIFIC GRAVITY: 1.02 - 1.04 FLASHPOINT METHOD: 癈
AND 49
Moderate EVAPORATION ca. 0.3 (Butyl Acetate=l)
RATE:
SOLUBILITY WATER:
IN
pH: Not available. FREEZING POINT: Not available.
BOILINGPOINT: 145-154癈 VISCOSITY: 10-35cP
FLAMMABLE LIMITSLFL & UFL: Not available.
SOLVENT(MMP) LFL: 1.9% UFL: 13.1%
LFL: 1.5% UFL: 11.4%
SOLVENT(EL)
JSRPFRIX560FDM2 Page4 of 6
AUTOIGNITION
TEMPERATURE: available
Not
SOLVENT(MMP) 389 癈 SOLVENT(EL) 400.1癈
10. STABILITY AND REACTIVITY
STABILITY: (CONDITIONSAVOID)
TO Materials containing similar structural groups
are normallystable.
INCOMPATIBILITY:
(SPECIFICMATERIALS AVOID)Strong oxidizing agents.
TO
HAZARDOUS DECOMPOSITION
PRODUCTS:
Combustionwill produce toxic vapors
and gases.
HAZARDOUS
POLYMERIZATION: not occur.
Will
11. TOXICOLOGICAL INFORMATION
ACUTE:
EntireMixture:not available.
El.:
INGESTION:LD50 rats is greaterthan5.0 g/kg.
for
LD50 mouse about2.5 g/kg.
for is
MM.PP:
INGESTION:LD50 malerats is about g/kg.
for 4.9
LD50 female
for rats is about3.7 g/kg.
LD50 mouse about2.3 g/kg.
for is
INHALATION: for rats is greater than 1200ppm.
LC50
Bisphenol Compound:
INGESTION: for rats is greater than 5.0 g/kg.
LD50
CHRONIC:
Bisphenol derivitive may cause following systemic
the effects; (a) depression body
in
weightgain; and(b) bloodeffects.
MUTAGENICITY:
MMP caused severemutationsin bacteria in the Ames
no assayor chromosamal
aberrationsin Chinese hamster ovary(CHO) cells.
REPRODUCTIVE DEVELOPMENTAL
AND TOXICITY:
A preliminary reproductive toxicity studyin whichrats wereexposed 0, 100,300or
to
1000ppm 6 hours/day.
for Duringdays6 to 15 of pregnancy indicatedslight maternal
toxicity at all doses (slightly lowermean weightgainandindicatedwater
body
consumption) a slight reductionin mean
and fetal bodyweightat 1000 ppm.Potential
developmental toxicity also wasinvestigated rats exposed 0, 5, 50, or 500ppm
in to for
6 hours/day from6 to 15 of pregnancy. significant adverse
No effects werenotedin rats
treated with 50 ppm below.
or
SUBCHRONIC:
Notavailable.
REPEATEXPOSURE:
Repeat exposure rats for 6 hours/day,5 days/week 4 weeks 1000and2000
to for to
ppm caused
MMP lethargyandrespiratoryirritation. Salivationwas reportedin rats
administered mg/kg/day for three months in some
600 MMP and rats treated with 200
mg/kg/day.
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JSRPFRIX560FDM2
ECOLOGICAL INFORMATION
12.
ECOTOXICOLOGICAL
INFORMATION:
ENTIRE
MIXTURE: available.
Not
SOLVENT & MMP):
(EL Not available.
BISPHENOL
COMPOUND: available.
Not
13. DISPOSAL CONSIDERATIONS
Wastemustbe disposed in accordance federal, state andlocal environmental
of with
control regulations.Incinerationis the preferredmethod.
Empty
containersmustbe
handled with care due to product residue. DONOT HEAT CUT
OR EMPTY
CONTAINER WITH ELECTRICOR GASTORCH.
14. TRANSPORT INFORMATION
TRANSPORTATION HAZARDOUS
AND MATERIALS DESCRIPTION:Package and
transport in accordance Department Transportation
with of (DOT) other regulatoryagency
and
requirements.
PROPERSHIPPINGNAME:
Resin Solution
IDENTIFICATIONNUMBER:
UN1866
15. REGULATORYINFORMATION
OSHA HAZARD COMMUNICATION STANDARD, CFR1920.1200: Ensure that the
29
hazardsassociatedwith this productare transmittedto employees means a hazard
by of
communications
program, accordance federal andstate Occupational
in with Safety and
HealthAdministration(OSHA) regulations.
CERCLA]SUPERFUND CATEGORY: the time of this document's
HAZARD At
preparation,
none the ingredients this product
of of werelisted in 40 CFR
302.4,Thelist
shouldbe periodically checked applicableupdates.
for
SARA INFORMATION: time of this document's
313 At the preparation, noneof the
ingredients this product
of werelisted in 40 CFR Thelist should periodically
372. be
checked applicableupdates.
for
TOXIC SUBSTANCES CONTROL (TSCA): All of the compounds this product are
ACT in
on the TSCA Inventory and/or are subject to a LowVolume Exemption. bisphenol
The
derivative is subjectto the significant newuserule (40 CFR 721.1820). accordance
In
with federal regulations,this Photoresist shall be used onlyto industrially manufacture
integratedcircuits. In particular, this materialshall not bedistributedto anyperson, other
thanfor disposal,until after it hasbeen completely reacted. usersmust
All utilize the
workerprotectionmeasures environmental
and releasecontrols specified in this Material
SafetyDataSheet.Thesignificant newuserule codified in 40 CFR 721.1820 shouldbe
reviewedto ensurehazardcommunication programs, workplace practices and
recordkeeping federal requirements. of this productwithout implementing
meet Use the
programs specified in 40 CFR 721.1820 shall be considered significant newuse.
a
Acknowledgement of receipt of this Material SafetyDataSheetshall be considered
acknowledgement the user will comply
that with theserequirements.
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JSRPFRIX560FDM2
CALIFORNIA PROPOSITIONAt the time of this document's
65: preparation, noneof the
ingredients this product
of wereincluded the CaliforniaProposition list of chemicals
on 65
known cause
to cancer reproductive
or toxicity. Thelist shouldperiodically be checked
for applicableupdates.
16. OTHER INFORMATION
MSDS STATUS: REVISION SUMMARY:
May20, 1993: Original MSDS
established.
Jan. 5, 1994:Page exposure
1 limit for MMPsolvent added.
Feb. 15, 1994: Items (TOXICOLOGICAL INFORMATION, ECOLOGICAL
INFORMATION, ECOLOGICAL CONSIDERATION) add.
Feb.20, 1996:Revision established.
4
May 1996:Revision5 established.
24,
May 1998:Revision6established.
28,
Tothe best of our knowledge, informationcontained
the herein is accurate.However,
neither JapanSynthetic
Rubber Ltd. nor anyof its subsidiaries
Co., assumes liability
any
whatsoever the accuracy completeness the informationcontained
for or of herein.
Final determination suitability of anymaterial the soleresponsibility the user.All
of is of
materials maypresentunknown hazardsandshouldbe usedwith caution.
Althoughcertain hazards described
are herein, wecannotguarantee
that theseare the
only hazards exist.
that
JSRMicroelectronics,
Inc.
1280North Mathilda Avenue
Sunnyvale, CA94089
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