1254 Chestnut Street
Newton, MA 02464-1418
Tel: (617) 965-5511
Fax: (617) 965-5818
MATERIAL SAFETY DATA SHEET PAGE 1
03 March 2005
SECTION 1. CHEMICAL IDENTIFICATION ---------------------------------------------------------
CHEMICAL NAME: Organic Polymer Solution
TRADE NAME: 950PMMA Series Resists in Chlorobenzene
Positive Radiation Sensitive Resists
PRODUCT #: See Table 1 ?Section 9
SECTION 2. COMPOSITION-----------------------------------------------------------------------------
HAZARDOUS
INGREDIENTS: Monochlorobenzene (CAS: 108-90-7); 85-99%
(See Table 1 ?Section 9)
OTHER
INGREDIENTS: Poly(methylmethacrylate) (CAS: 9011-14-7)
SECTION 3. HAZARD DATA----------------------------------------------------------------------------
INFLAMMABILITY: Flammable liquid.
SKIN CONTACT: Vapor and liquid can be extremely irritating to the skin.
EYE CONTACT: Vapor and liquid can be extremely irritating to the eyes.
INGESTION: Harmful or fatal if swallowed.
INHALATION: May cause respiratory tract irritation. Harmful or fatal if inhaled.
MUTAGENICITY: Not known to be mutagenic.
CARCINOGENICITY: Not known to be carcinogenic.
TARGET ORGANS: Skin, Liver, Kidneys, Respiratory System and Central Nervous
System.
SECTION 4. FIRST AID MEASURES-------------------------------------------------------------------
INHALATION: If inhaled, remove to fresh air. Contact a poison control center,
emergency room or physician right away as further treatment will be
necessary.
INGESTION: DO NOT induce vomiting. Gently wipe or rinse the inside of the
mouth with water. Sips of water may be given if person is fully
conscious. Never give anything by mouth to an unconscious or
convulsing person. Contact a poison control center, emergency room
or physician right away as further treatment will be necessary.
SKIN CONTACT: Run a gentle stream of water over the affected area for 15 minutes. A
mild soap may be used if available. Contact a poison control center,
emergency room or physician right away as further treatment will be
necessary.
EYE CONTACT: Pour a gentle stream of warm water through the affected eye for at
least 15 minutes. Contact a poison control center, emergency room or
physician right away as further treatment will be necessary.
MATERIAL SAFETY DATA SHEET PAGE 2
03 March 2005
CHEMICAL NAME: Organic Polymer Solution
TRADE NAME: 950PMMA Series Resists in Chlorobenzene
Positive Radiation Sensitive Resists
PRODUCT #: See Table 1 ?Section 9
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SECTION 5. FIRE FIGHTING MEASURES-----------------------------------------------------------
EXTINGUISHING MEDIA: Dry chemical, carbon dioxide.
SPECIAL FIRE FIGHTING
PRECAUTIONS: Firefighters should wear NIOSH/MSHA approved self-
contained breathing apparatus and full protective clothing.
Remove all ignition sources if it can be done safely.
UNUSUAL FIRE OR
EXPLOSION HAZARDS: Emits toxic fumes under fire conditions. Can decompose to
toxic, corrosive hydrogen chloride and possible traces of
phosgene. Heat will build pressure and may rupture closed
containers. Keep containers cool with water spray. Vapor may
travel a considerable distance to source of ignition and flash
back.
SECTION 6. ACCIDENTAL RELEASE PROCEDURES -------------------------------------------
EVACUATION
PROCEDURES & SAFETY: Wear appropriate protective gear for the situation. See Personal
Protection information in Section 8.
CLEANUP & DISPOSAL
OF SPILL: Absorb with an inert absorbent. Sweep up and place in an
appropriate closed container (see Section 7). Clean up residual
material by washing area with water. Collect washings for
disposal.
ENVIRONMENTAL &
REGULATORY REPORTING: Do not flush to drain. If required proper authorities should be
notified.
SECTION 7. STORAGE AND HANDLING PRECAUTIONS---------------------------------------
STORAGE: Store in tightly closed container in a cool environment away from
direct sunlight. Do not store in aluminum containers.
HANDLING: Use only under yellow light.
Keep away from heat, sparks, and flames.
Use only with mechanical exhaust.
Do not contact with skin, eyes, and clothing. Severe eye irritant.
Avoid prolonged or repeated contact with skin.
Do not breathe vapors or mist.
Wash with soap and water after handling.
Have safety shower and eye wash available.
Store and transfer under a blanket of dry inert gas.
_____________________________________________________________________________________________________
MicroChem Corp. 1254 Chestnut Street種ewton, MA 02464-1418稵el:(617)965-5511稦ax:(617)965-5818
MATERIAL SAFETY DATA SHEET PAGE 3
03 March 2005
CHEMICAL NAME: Organic Polymer Solution
TRADE NAME: 950PMMA Series Resists in Chlorobenzene
Positive Radiation Sensitive Resists
PRODUCT #: See Table 1 ?Section 9
-----------------------------------------------------------------------------------------------------------------------------------------
SECTION 8. EXPOSURE CONTROLS AND PERSONAL PROTECTION-----------------------
RESPIRATORY
PROTECTION: Under normal conditions, use of air-purifying (half-mask/full-face)
respirator with cartridges/canisters approved for use against organic
vapors, dust, mists and fumes is recommended.
VENTILATION: General area dilution/exhaust or local ventilation.
SKIN PROTECTION: Impervious (Viton? PVA) gloves are highly recommended.
EYE PROTECTION: Safety goggles are highly recommended.
SECTION 9. PHYSICAL AND CHEMICAL DATA--------------------------------------------------
APPEARANCE: Clear, colorless liquid
ODOR: Mild, mothball-like
BOILING POINT: 132 篊 (270 篎)
SPECIFIC GRAVITY: See Table 1 below
VAPOR PRESSURE: 11.8 mm @ 20 篊 (68 篎)
VAPOR DENSITY: 3.9 (air=1)
H2O SOLUBILITY: 0.05% @ 30 篊, by wt.
% VOLATILES: See Table 1 below
EVAPORATION RATE: NA
FLASH POINT: 28 篊 (82 篎) TCC
AUTOIGNITION TEMP: 638 篊 (1180 篎)
EXPLOSION LIMITS: 1.3% lower
7.1% upper
Table 1
Name Product # Specific Gravity (g/ml) Volatiles (% by wt.) VOC (g/L)
950C1 M240001 1.106 99 1095
950C2 M240002 1.107 98 1085
950C3 M240003 1.108 97 1075
950C4 M240004 1.109 96 1065
950C4.5 M240504 1.109 95.5 1060
950C5 M240005 1.110 95 1055
950C6 M240006 1.111 94 1045
950C6.5 M240506 1.112 93.5 1040
950C7 M240007 1.113 93 1035
950C7.5 M240507 1.113 92.5 1030
950C8 M240008 1.114 92 1025
950C9 M240009 1.115 91 1015
950C10 M240010 1.115 90 1005
950C11 M240011 1.116 89 995
950C12 M240012 1.117 88 985
950C15 M240015 1.120 85 950
_____________________________________________________________________________________________________
MicroChem Corp. 1254 Chestnut Street種ewton, MA 02464-1418稵el:(617)965-5511稦ax:(617)965-5818
MATERIAL SAFETY DATA SHEET PAGE 4
03 March 2005
CHEMICAL NAME: Organic Polymer Solution
TRADE NAME: 950PMMA Series Resists in Chlorobenzene
Positive Radiation Sensitive Resists
PRODUCT #: See Table 1 ?Section 9
-----------------------------------------------------------------------------------------------------------------------------------------
SECTION 10. REACTIVITY DATA -------------------------------------------------------------------
STABILITY: Stable
INCOMPATIBILITY: Strong Oxidizing Agents, Strong Acids, Aluminum,
Potassium, Sodium, Magnesium.
HAZARDOUS COMBUSTION OR
DECOMPOSITION PRODUCTS: Carbon Monoxide, Carbon Dioxide, Hydrogen Chloride
and possible traces of Phosgene.
SECTION 11. TOXICITY HAZARDS-------------------------------------------------------------------
As Chlorobenzene:
ACUTE EFFECTS:
Monochlorobenzene is a central nervous system depressant. Inhalation at concentrations in
excess of the OSHA permissible exposure limit can cause headache, dizziness, eye, nose and
throat irritation, nausea, feeling of drunkenness, unconsciousness and even death in confined or
poorly ventilated areas. The available scientific literature indicates that severe inhalation
overexposure may result in liver and kidney injury. May be absorbed through the skin. Small
amounts of this product aspirated into the respiratory system during ingestion or vomiting may
cause mild to severe pulmonary injury, including death.
ORAL: LD50 (rat): 1580 mg/kg
INHALATION: LC50 (rat): 22,000 ppm
ACGIH: ACGIH (TWA) 10 ppm
OSHA: OSHA (8hr TWA) 75 ppm
SECTION 12. ECOLOGICAL DATA--------------------------------------------------------------------
Ecotoxicological Information:
LC50 (96-hour, fathead minnow, flow-through): 16.9 mg/L
LC50 (48-hour, rainbow trout): 4.1 mg/L
LC50 (96-hour, bluegill): 16 mg/L
SECTION 13. DISPOSAL CONSIDERATIONS-------------------------------------------------------
Comply with applicable local, state or international regulations regarding the proper disposal of
this material and/or containers.
_____________________________________________________________________________________________________
MicroChem Corp. 1254 Chestnut Street種ewton, MA 02464-1418稵el:(617)965-5511稦ax:(617)965-5818
MATERIAL SAFETY DATA SHEET PAGE 5
03 March 2005
CHEMICAL NAME: Organic Polymer Solution
TRADE NAME: 950PMMA Series Resists in Chlorobenzene
Positive Radiation Sensitive Resists
PRODUCT #: See Table 1 ?Section 9
-----------------------------------------------------------------------------------------------------------------------------------------
SECTION 14. TRANSPORTATION INFORMATION------------------------------------------------
HAZARD CLASSIFICATION: Flammable Liquid
SHIPPING NAME: Resin Solution
UN NUMBER: UN 1866
PACKING GROUP: III
SECTION 15. REGULATORY INFORMATION------------------------------------------------------
EUROPEAN INFORMATION
EINECS LISTED
EC Nos: Monochlorobenzene 203-628-5
RISK & SAFETY PHRASES
R10 Flammable
R20 Harmful by inhalation.
R51/53 Toxic to aquatic organisms, may cause long-term adverse effects in the aquatic
environment.
S2 Keep out of the reach of children.
S24/25 Avoid contact with skin and eyes.
S61 Avoid release to the environment. Refer to special instructions/safety data sheets.
INDICATIONS OF DANGER
Xn Harmful
N Environmentally Dangerous
US AND INTERNATIONAL INFORMATION
HAZARDOUS LISTINGS: All ingredients appear on the TSCA Inventory of
Chemical Substances, EINECS, Canadian DSL and the
Japan ENCS Listing.
SARA Title III: This product IS subject to SARA Title III, Section 313
Reporting Requirements as chlorobenzene.
CERCLA Reportable Quantity: 100 lbs as chlorobenzene @ 88-99%
Calif. SCAQMD Rule 443.1 VOC's: See Table 1 ?Section 9
SECTION 16. ADDITIONAL PRECAUTIONS AND COMMENTS-------------------------------
National Fire Protection Association Hazard Ratings ?NFPA:
2 Health Hazard Rating
3 Flammability Rating
0 Reactivity Rating
_____________________________________________________________________________________________________
MicroChem Corp. 1254 Chestnut Street種ewton, MA 02464-1418稵el:(617)965-5511稦ax:(617)965-5818
MATERIAL SAFETY DATA SHEET PAGE 6
03 March 2005
CHEMICAL NAME: Organic Polymer Solution
TRADE NAME: 950PMMA Series Resists in Chlorobenzene
Positive Radiation Sensitive Resists
PRODUCT #: See Table 1 ?Section 9
-----------------------------------------------------------------------------------------------------------------------------------------
To the best of our knowledge, the above information is believed to be accurate but does
not claim to be all-inclusive and is intended to be used only as a guide. The supplier
makes no warranty of any kind, expressed or implied, concerning the use of this product
and shall not be held liable for any damage resulting from handling or from contact with
the above product. User assumes all risks incident to its use.
MSDS Revision Information:
A) Removed "NANO" name from trade name.
B) General update of MSDS. Added European Risk and Safety phrases to Section 15.
_____________________________________________________________________________________________________
MicroChem Corp. 1254 Chestnut Street種ewton, MA 02464-1418稵el:(617)965-5511稦ax:(617)965-5818
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