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MATERIAL SAFETY DATA SHEET


I PRODUCT IDENTIFICATION

Gallium Nitride Metal Nitride
Trade Name: Ch em ical Fam ily:
GaN 25617 -97-4
Form ula: CAS #:


II HAZAR DOUS INGRED IENTS

Hazardous Component % OSHA PEL ACGIH TLV
Gallium Nitride 0-100 N/E N/E


III PHYSICAL DATA

800.0 oC
N/E
Boiling Point: Melting Point:
Solid N/A
Physical States: Vapor Density (Air=1):
6.1 gm/cc N/A
Specific Gravity: Vapor Pressure (mm Hg):
Dark grey powd er, slight amm onia odor in m oist air. Insoluble
Appearance and Odor: Solubility in Water:


IV FIRE AND EXPLOSION H AZARDS DATA

Flash Point (Method Used): N/A (Non-flammable) Explosive Lim its: LEL: NA UEL: NA

Extingu ishing Media: DO NO T USE WA TER. Use suitable extinguishing media for surrounding materials and type of fire.
Special Fire Fighting Procedures: Firefighters must wear full face, self-contained breathing apparatus with full protective clothing
to prevent contact with skin and eyes. Fumes from fire are hazardous. Isolate runoff to prevent environmental pollution.

Unusual Fire & Explosion Hazards: When heated to decomposition, gallium nitride may em it toxic fumes of ammon ia. Contact
with w ater releases flam mable gases.


V HEALTH HAZARD INFORMATION

Effects of Exposure:

To the best of o ur know ledge the chem ical, ph ysical and toxicolog ical pro perties of gallium nitride have not been thoro ugh ly
investigated and recorded.

Gallium and gallium compounds may cause metallic taste, dermatitis and depression of the bone marrow function. Large
doses m ay cau se hem orrhag ic nephritis.

The details of the toxicity of n itrides as a gro up are un kno wn . (Sax, Dan gero us Prope rties of In dustrial M aterials, eig hth
edition)
Acute E ffects:

Inhalation: May cause irritation to the n ose, throat & mu cous m embranes.
Ingestion: May cause nausea, vomiting and anorexia.
Skin : May cause irritation.
Eye: May cause irritation.

Chro nic Effects:

Inhalation: May cause depression of bone marrow function.
Ingestion: No chronic health effects recorded.
Skin : May cause dermatitis & depression of bone marrow function.
Eye: No chronic health effects recorded.

Routes of Entry: Inhalation, Skin, Eyes, Ingestion,
Target Organs: No target organs recorded.

Carcino genicity: None
Medical Conditions Generally Aggravated by Exposure: Pre-existing resp iratory disord ers.

Signs and Symptom s of Exposure:

Inhalation: May cause a red, dry throat, sneezing, coughing and difficulty breathing.
Ingestion: May cause behavioral changes such as sleepiness and loss of appetite may be noted. Other symptom s may include nausea,
vomiting, metallic taste in mouth general itching and sweating.
Skin : May cause redness and itching.
Eye: May cause redness, itching and watering.

EMERG ENCY AND FIRST AID PROCEDURES:

INHALATION: Remove victim to fresh air; keep warm and quiet; give oxygen if breathing is difficult and seek medical attention.
INGESTION: Give 1-2 glasses of mild or water, induce vomiting. Keep warm and quite. Seek medical attention. Never give
anything by mouth or induce vomiting to an unconscious person.
SK IN: Remove contaminated clothing; brush material off skin. Wash affected area with mild soap and water; seek medical attention
if sym ptom s persist.
EYE: Flush eyes with lukewarm water, lifting upper and lower eyelids, for at least 15 minutes. Seek medical attention if symptoms
persist.


VI REACTIVITY DATA

Stability: Stable

Co nditio ns to Av oid: Water/moisture, heat
Incompatibility (Materials to Avoid): Wa ter/m oisture , oxid izing agen ts

Hazardous Decomposition: Amm onia Gas
Hazardous Polymerization: Will not occur




-Gallium Nitride 2-
VII SPILL OR LEAK PROC EDURES

Steps to be Taken in Case Material is Released or Spilled: Wear appropriate protective gear. Isolate spill area and provide
ventilation. Vacuum up spill using a high efficiency particulate absolute (HEPA ) air filter and place in a closed container for proper
dispo sal. Take ca re no t to raise d ust.

Waste Disposal Method: Dispose o f in accord ance w ith Loca l, State and Federal regu lations.


VIII SPECIAL PROTECTION INFORMATION

Respiratory Protection: Use a NIOSH/MSH A approved air purifying respirator with appropriate cartridge.
Ventilation: Han dle unde r dry argo n. Use loca l exhaust to ma intain c onc entration at low exposure levels. M echanica l (General)
exhaust is recommended

Protective Gloves: Rubber gloves
Eye Protection: Safety glasses

Protective Clothing: Protective gear suitable to prevent contamination


IX SPECIAL PRECAUTIONS

Precautions to Be Taken in Handling and Storing: Han dle unde r dry argo n. Keep container tightly sealed . Store in cool, dry area,
in tightly sealed containers. Store away from water/moisture. Store away from oxidizing agents. Store under dry inert gas. Ensure
good ventilation at the work place. Wash thoroughly after handling.

Wo rk Practices: Imp lem ent en gineering and wo rk practice controls to re duc e and ma intain c onc entration o f exp osure at low levels.
Use good housekeeping and sanitation practices. Do not use tobacco or food in work area. Wash thoroughly before eating and
smok ing. Do not blow dust off clothing or skin with comp ressed air.

The abo ve inform ation is believ ed to be co rrect, but do es no t purp ort to b e all inclu sive an d sha ll be used only as a gu ide.
ESPI shall not be held liab le for any d am age resulting from h and ling o r from contact with the abov e pro duc t.


Prepared by: S. Dierks
Dated: June 2003




-Gallium Nitride 3-

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